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Naji, M. |
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Motta, Antonella |
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Aletan, Dirar |
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Mohamed, Tarek |
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Ertürk, Emre |
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Taccardi, Nicola |
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Kononenko, Denys |
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Petrov, R. H. | Madrid |
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Alshaaer, Mazen | Brussels |
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Bih, L. |
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Casati, R. |
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Muller, Hermance |
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Kočí, Jan | Prague |
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Šuljagić, Marija |
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Kalteremidou, Kalliopi-Artemi | Brussels |
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Azam, Siraj |
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Ospanova, Alyiya |
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Blanpain, Bart |
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Ali, M. A. |
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Popa, V. |
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Rančić, M. |
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Ollier, Nadège |
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Azevedo, Nuno Monteiro |
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Landes, Michael |
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Rignanese, Gian-Marco |
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Zenasni, A.
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (5/5 displayed)
- 2014Dielectric properties of SiOx like films deposited from TMS/O-2 mixture in low pressure microwave plasmacitations
- 2010Microwave characterization of porous SiOCH permittivity after integration dedicated to the 32 nm nodecitations
- 2009Grazing incidence small angle x-ray scattering study of the structure of nanoporous ultralow-k dielectrics prepared by plasma enhanced chemical vapor depositioncitations
- 2008Evaluation of ellipsometric porosimetry for in-line characterization of ultra low-$kappa$ dielectricscitations
- 2008Evaluation of ellipsometric porosimetry for in‐line characterization of ultra low‐κ dielectricscitations
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