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Naji, M. |
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Motta, Antonella |
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Aletan, Dirar |
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Mohamed, Tarek |
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Ertürk, Emre |
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Taccardi, Nicola |
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Kononenko, Denys |
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Petrov, R. H. | Madrid |
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Alshaaer, Mazen | Brussels |
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Bih, L. |
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Casati, R. |
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Muller, Hermance |
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Kočí, Jan | Prague |
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Šuljagić, Marija |
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Kalteremidou, Kalliopi-Artemi | Brussels |
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Azam, Siraj |
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Ospanova, Alyiya |
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Blanpain, Bart |
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Ali, M. A. |
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Popa, V. |
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Rančić, M. |
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Ollier, Nadège |
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Azevedo, Nuno Monteiro |
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Landes, Michael |
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Rignanese, Gian-Marco |
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Dussart, Remi
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (11/11 displayed)
- 2024MHCD in N2-H2 mixtures: towards a localized plasma nitriding process?
- 2017Morphology control in thin films of PS: PLA homopolymer blends by dip-coating depositioncitations
- 2015Polymer masks for structured surface and plasma etchingcitations
- 2014Submicrometric structured silicon surfaces obtained from polymer blend film by silica replication and cryogenic plasma etching
- 2014Cryogenic etching of submicronic features in silicon using masks based on porous polymer films
- 2014Titanium oxide thin film growth by magnetron sputtering: Total energy flux and its relationship with the phase constitutioncitations
- 2013Energy transferred to the substrate surface during reactive magnetron sputtering of aluminum in Ar/O2 atmospherecitations
- 2013IR emission from the target during plasma magnetron sputter depositioncitations
- 2013Energy flux measurements at the substrate deposition during reactive and non-reactive magnetron sputter deposition processes
- 2011Alternating SiCl4/O2 passivation steps with SF6 etch steps for silicon deep etching
- 2009Cryogenic etching of n-type silicon with p+ doped walls with the TGZM process through the Al/Si eutectic alloycitations
Places of action
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