693.932 PEOPLE
| People | Locations | Statistics |
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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Lefaucheux, Philippe
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Topics
Publications (7/7 displayed)
- 2023Evaluation of Bosch processing at cryogenic temperatures
- 2021Titanium isotropic and anisotropic etching for MEMS applications
- 2021Comparison between Bosch and STiGer Processes for Deep Silicon Etchingcitations
- 2015Polymer masks for structured surface and plasma etchingcitations
- 2014Cryogenic etching of submicronic features in silicon using masks based on porous polymer films
- 2011Alternating SiCl4/O2 passivation steps with SF6 etch steps for silicon deep etching
- 2009Cryogenic etching of n-type silicon with p+ doped walls with the TGZM process through the Al/Si eutectic alloycitations
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