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Naji, M. |
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Motta, Antonella |
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Aletan, Dirar |
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Mohamed, Tarek |
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Ertürk, Emre |
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Taccardi, Nicola |
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Kononenko, Denys |
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Petrov, R. H. | Madrid |
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Alshaaer, Mazen | Brussels |
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Bih, L. |
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Casati, R. |
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Muller, Hermance |
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Kočí, Jan | Prague |
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Šuljagić, Marija |
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Kalteremidou, Kalliopi-Artemi | Brussels |
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Azam, Siraj |
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Ospanova, Alyiya |
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Blanpain, Bart |
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Ali, M. A. |
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Popa, V. |
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Rančić, M. |
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Ollier, Nadège |
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Azevedo, Nuno Monteiro |
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Landes, Michael |
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Rignanese, Gian-Marco |
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Vallée, Corentin
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Topics
Publications (7/7 displayed)
- 2018Aluminum nitride thin films deposited by hydrogen plasma enhanced and thermal atomic layer depositioncitations
- 2017High capacitance density of 185 nF/mm 2 achieved in three-dimensional MIM structures using TiO 2 as a dielectriccitations
- 2016Low-frequency dielectric properties of intrinsic and Al-doped rutile TiO 2 thin films grown by the atomic layer deposition techniquecitations
- 2015Control of carbon content in amorphous GeTe films deposited by Plasma Enhanced Chemical Vapor deposition (PE-MOCVD) for Phase-Change Random Access Memory applicationscitations
- 2004Metal-Insulator-Metal capacitors using Y2O3 dielectric grown by pulsed-injection plasma enhanced metalorganic chemical vapor depositioncitations
- 2004Interface formation during the yttrium oxide deposition on Si by pulsed liquid-injection plasma enhanced metal organic chemical vapor depositioncitations
- 2002Nitrogen profiles in materials implanted via plasma-based ion implantationcitations
Places of action
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