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Naji, M. |
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Motta, Antonella |
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Aletan, Dirar |
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Mohamed, Tarek |
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Ertürk, Emre |
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Taccardi, Nicola |
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Kononenko, Denys |
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Petrov, R. H. | Madrid |
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Alshaaer, Mazen | Brussels |
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Bih, L. |
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Casati, R. |
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Muller, Hermance |
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Kočí, Jan | Prague |
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Šuljagić, Marija |
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Kalteremidou, Kalliopi-Artemi | Brussels |
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Azam, Siraj |
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Ospanova, Alyiya |
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Blanpain, Bart |
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Ali, M. A. |
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Popa, V. |
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Rančić, M. |
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Ollier, Nadège |
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Azevedo, Nuno Monteiro |
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Landes, Michael |
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Rignanese, Gian-Marco |
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Jousseaume, V.
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (4/4 displayed)
- 2017Conformal isolation of high-aspect-ratio TSVs using a low-kappa dielectric deposited by filament-assisted CVDcitations
- 2010Microwave characterization of porous SiOCH permittivity after integration dedicated to the 32 nm nodecitations
- 2009Grazing incidence small angle x-ray scattering study of the structure of nanoporous ultralow-k dielectrics prepared by plasma enhanced chemical vapor depositioncitations
- 2009Influence of polymer porogens on the porosity and mechanical properties of spin coated Ultra Low k dielectricscitations
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