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Naji, M. |
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Motta, Antonella |
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Aletan, Dirar |
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Mohamed, Tarek |
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Ertürk, Emre |
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Taccardi, Nicola |
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Kononenko, Denys |
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Petrov, R. H. | Madrid |
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Alshaaer, Mazen | Brussels |
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Bih, L. |
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Casati, R. |
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Muller, Hermance |
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Kočí, Jan | Prague |
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Šuljagić, Marija |
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Kalteremidou, Kalliopi-Artemi | Brussels |
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Azam, Siraj |
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Ospanova, Alyiya |
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Blanpain, Bart |
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Ali, M. A. |
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Popa, V. |
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Rančić, M. |
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Ollier, Nadège |
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Azevedo, Nuno Monteiro |
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Landes, Michael |
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Rignanese, Gian-Marco |
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Ecke, Ramona
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (9/9 displayed)
- 2021Simulations for nanoindentation on thin metal films and the potential influence of creepcitations
- 2020Nanoindentation as part of material characterization of thin metal filmscitations
- 2020On the relationship between SiF4plasma species and sample properties in ultra low-k etching processes
- 2016Characterisation of the barrier formation process of self-forming barriers with CuMn, CuTi and CuZr alloyscitations
- 2016Atomic layer deposition of ultrathin Cu2O and subsequent reduction to Cu studied by in situ x-ray photoelectron spectroscopycitations
- 20153D integration approaches for MEMS and CMOS sensors based on a Cu through-silicon-via technology and wafer level bondingcitations
- 2012Growth of carbon nanotube forests between a bi-metallic catalyst layer and a SiO2 substrate to form a self-assembled carbon-metal heterostructurecitations
- 2010Carbon nanotubes for nanoscale low temperature flip chip connectionscitations
- 2009Copper oxide films grown by atomic layer deposition from Bis(tri-n-butylphosphane)copper(I)acetylacetonate on Ta, TaN, Ru, and SiO2citations
Places of action
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