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Naji, M. |
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Motta, Antonella |
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Aletan, Dirar |
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Mohamed, Tarek |
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Ertürk, Emre |
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Taccardi, Nicola |
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Kononenko, Denys |
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Petrov, R. H. | Madrid |
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Alshaaer, Mazen | Brussels |
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Bih, L. |
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Casati, R. |
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Muller, Hermance |
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Kočí, Jan | Prague |
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Šuljagić, Marija |
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Kalteremidou, Kalliopi-Artemi | Brussels |
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Azam, Siraj |
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Ospanova, Alyiya |
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Blanpain, Bart |
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Ali, M. A. |
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Popa, V. |
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Rančić, M. |
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Ollier, Nadège |
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Azevedo, Nuno Monteiro |
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Landes, Michael |
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Rignanese, Gian-Marco |
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Pflug, A.
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (21/21 displayed)
- 2018TiOx deposited by magnetron sputteringcitations
- 2015Rotatable serial co-sputtering of doped titaniacitations
- 2015Heuristic modeling of the doping efficiency in sputtered TCO layerscitations
- 2014Rotatable serial co-sputtering of doped titania
- 2012Modelling of sputtering yield amplification in serial reactive magnetron co-sputteringcitations
- 2011Sputter yield amplification by tungsten doping of Al2O3 employing reactive serial co-sputtering: process characteristics and resulting film propertiescitations
- 2010Modelling of sputtering yield amplification effect in reactive deposition of oxidescitations
- 2009Reactive magnetron sputtering of ZnO:Al
- 2009Optical modeling of free electron behavior in highly doped ZnO filmscitations
- 2009Influence of damp heat on the optical and electrical properties of Al-doped zinc oxidecitations
- 2008Tailoring of structure formation and phase composition in reactively sputtered zirconium oxide films using nitrogen as an additional reactive gascitations
- 2008Research on promising applications for high power pulse magnetron sputtering
- 2006Parallel DSMC gasflow simulation of an in-line coater for reactive sputteringcitations
- 2006High power pulsed magnetron sputtering (HPPMS)
- 2006A second hysteresis effect of reactive magnetron sputtering in compound mode
- 2005Modeling of the plasma impedance in reactive magnetron sputtering for various target materials
- 2005Modelling of sputter erosion rate enhancement from ceramic targets
- 2004Modeling of the film thickness distribution along transport direction in in-line coaters for reactive sputtering
- 2003Simulation of reactive sputtering kinetics in real in-line processing chamberscitations
- 2002Simulation of reactive magnetron sputtering kinetics in real in-line processing chambers
- 2002Simulation of reactive sputtering kinetics in real in-line processing chambers
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