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Naji, M. |
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Motta, Antonella |
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Aletan, Dirar |
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Mohamed, Tarek |
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Ertürk, Emre |
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Taccardi, Nicola |
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Kononenko, Denys |
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Petrov, R. H. | Madrid |
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Alshaaer, Mazen | Brussels |
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Bih, L. |
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Casati, R. |
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Muller, Hermance |
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Kočí, Jan | Prague |
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Šuljagić, Marija |
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Kalteremidou, Kalliopi-Artemi | Brussels |
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Azam, Siraj |
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Ospanova, Alyiya |
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Blanpain, Bart |
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Ali, M. A. |
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Popa, V. |
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Rančić, M. |
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Ollier, Nadège |
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Azevedo, Nuno Monteiro |
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Landes, Michael |
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Rignanese, Gian-Marco |
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Anderle, Mariano
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (21/21 displayed)
- 2010Effect of Materials for Micro-electro-mechanical Systems on PCR Yieldcitations
- 2008Effects of oxygen concentration in the Ar/O2 plasma on the bulk structure and surface properties of RF reactively sputtered zirconia thin filmscitations
- 2008Optical absorption parameters of amorphous carbon films from Forouhi-Bloomer and Tauc-Lorentz models: a comparative studycitations
- 2008Optical absorption in ZrO2-x-C nanocomposite films on polymer substrates: application of an effective medium theory
- 2008Optical and mechanical characterization of zirconia–carbon nanocomposite filmscitations
- 2007The C1s core line in irradiated graphitecitations
- 2006Damage of ultralow k materials during photoresist mask stripping processcitations
- 2006An electron spectroscopy study of a-C :H under thermal annealingcitations
- 2006Production and characterization of thin a-C:(H) films for gas permeation barrier functionality against He, CO2, N2, O2 and H2Ocitations
- 2006The role of hydrogen in the electronic structure of amorphous carbon: an electron spectroscopy study
- 2006The electronic structure of carbon films deposited in rf argon–hydrogen plasmacitations
- 2005Porosity- induced effects during C4F8/90% Ar plasma etching of silica-based ultralow-k dielectricscitations
- 2005Thin Film Transformations and Volatile Products in the Formation of Nanoporous Low-K PMSSQ-based Dielectriccitations
- 2005An electron spectroscopy study of a-C:H films produced by PACVD in a CH4-CO2 gas mixturecitations
- 2005Stress and interfacial defects induced by amorphous carbon film growth on siliconcitations
- 2005Carbon film deposition on polyethylene terephtalate by pulsed-plasma technology
- 2004Argon-Hydrogen rf plasma study for carbon film depositioncitations
- 2004ToF-SIMS studies of nanoporous PMSSQ materials: Kinetics and reactions in the processing of low-K dielectrics for ULSI applicationscitations
- 2002Chemical and microstructural characterisation of silicon-containing carbon films
- 2001Carbon effect on the phase structure and the hardness of r.f. sputtered zirconia films
- 2000Structural and compositional study of B-C-N films produced by laser ablation of B4C targets in N2 atmosphere
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