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Naji, M. |
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Motta, Antonella |
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Aletan, Dirar |
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Mohamed, Tarek |
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Ertürk, Emre |
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Taccardi, Nicola |
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Kononenko, Denys |
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Petrov, R. H. | Madrid |
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Alshaaer, Mazen | Brussels |
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Bih, L. |
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Casati, R. |
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Muller, Hermance |
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Kočí, Jan | Prague |
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Šuljagić, Marija |
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Kalteremidou, Kalliopi-Artemi | Brussels |
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Azam, Siraj |
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Ospanova, Alyiya |
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Blanpain, Bart |
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Ali, M. A. |
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Popa, V. |
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Rančić, M. |
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Ollier, Nadège |
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Azevedo, Nuno Monteiro |
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Landes, Michael |
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Rignanese, Gian-Marco |
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Hugon, Robert
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (5/5 displayed)
- 2014Microwave Plasma Process for SiCN:H Thin Films Synthesis with Composition Varying from SiC:H to SiN:H in H-2/N-2/Ar/Hexamethyldisilazane Gas Mixturecitations
- 2013Study of the chemical etching of carbon surfaces facing argon/hydrogen plasmas in a helicon type reactor
- 2011The influence of CH(4) addition on composition, structure and optical characteristics of SiCN thin films deposited in a CH(4)/N(2)/Ar/hexamethyldisilazane microwave plasmacitations
- 2011The influence of CH(4) addition on composition, structure and optical characteristics of SiCN thin films deposited in a CH(4)/N(2)/Ar/hexamethyldisilazane microwave plasmacitations
- 2001Surface cleaning and passivation of an iron foil by a nitrogen post-discharge surface treatmentcitations
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