People | Locations | Statistics |
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Naji, M. |
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Motta, Antonella |
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Aletan, Dirar |
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Mohamed, Tarek |
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Ertürk, Emre |
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Taccardi, Nicola |
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Kononenko, Denys |
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Petrov, R. H. | Madrid |
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Alshaaer, Mazen | Brussels |
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Bih, L. |
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Casati, R. |
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Muller, Hermance |
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Kočí, Jan | Prague |
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Šuljagić, Marija |
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Kalteremidou, Kalliopi-Artemi | Brussels |
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Azam, Siraj |
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Ospanova, Alyiya |
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Blanpain, Bart |
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Ali, M. A. |
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Popa, V. |
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Rančić, M. |
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Ollier, Nadège |
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Azevedo, Nuno Monteiro |
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Landes, Michael |
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Rignanese, Gian-Marco |
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Ritala, Mikko
University of Helsinki
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (194/194 displayed)
- 2024Atomic Layer Deposition of ScF3 and ScxAl yFz Thin Filmscitations
- 2024Atomic Layer Deposition of Molybdenum Carbide Thin Filmscitations
- 2024Atomic Layer Deposition of Molybdenum Carbide Thin Filmscitations
- 2024Area-Selective Etching of Poly(methyl methacrylate) Films by Catalytic Decompositioncitations
- 2024Highly dispersed atomic layer deposited CrOx on SiO2 catalyst with enhanced yield of propylene for CO2 –mediated oxidative dehydrogenation of propanecitations
- 2024Area-Selective Etching of Poly(lactic acid) Films via Catalytic Hydrogenolysis and Crackingcitations
- 20243D-printed sensor electric circuits using atomic layer depositioncitations
- 2023Area-Selective Etching of Poly(methyl methacrylate) Films by Catalytic Decompositioncitations
- 2023Conversion of ALD CuO Thin Films into Transparent Conductive p-Type CuI Thin Filmscitations
- 2023Molecular layer deposition of hybrid silphenylene-based dielectric filmcitations
- 2023Effect of Atomic-Layer-Deposited Hydroxyapatite Coating on Surface Thrombogenicity of Titaniumcitations
- 2023Atomic Layer Deposition and Pulsed Chemical Vapor Deposition of SnI2 and CsSnI3citations
- 2023Oxygen and nitrogen plasma modifications of ZnCuCo LDH-graphene nanocomposites for photocatalytic hydrogen production and antibiotic degradationcitations
- 2023Atomic Layer Deposition and Pulsed Chemical Vapor Deposition of SnI2 and CsSnI3citations
- 2023Atomic Layer Deposition of Boron-Doped Al2O3 Dielectric Filmscitations
- 2022Highly dispersed atomic layer deposited CrOx on SiO2 catalyst with enhanced yield of propylene for CO2 –mediated oxidative dehydrogenation of propanecitations
- 2022Self-Aligned Thin-Film Patterning by Area-Selective Etching of Polymers
- 2022Titania Nanotubes/Hydroxyapatite Nanocomposites Produced with the Use of the Atomic Layer Deposition Technique: Estimation of Bioactivity and Nanomechanical Properties
- 2022Atomic layer deposition of GdF 3 thin filmscitations
- 2022Substrate-Dependent Area-Selective Atomic Layer Deposition of Noble Metals from Metal beta-Diketonate Precursorscitations
- 2022Atomic layer deposition of PbCl2, PbBr2 and mixed lead halide (Cl, Br, I) PbXnY2-n thin filmscitations
- 2022Atomic layer deposition of GdF3 thin filmscitations
- 2022Reaction mechanism studies on atomic layer deposition process of AlF3citations
- 2022Atomic layer deposition of GdF3thin filmscitations
- 2022Osteoblast Attachment on Titanium Coated with Hydroxyapatite by Atomic Layer Depositioncitations
- 2022Atomic Layer Deposition of CsI and CsPbI3citations
- 2021Atomic layer deposition of TbF3 thin filmscitations
- 2021Atomic layer deposition of TbF3 thin filmscitations
- 2021In situ reaction mechanism study on atomic layer deposition of intermetallic Co3Sn2 thin filmscitations
- 2021Rhenium Metal and Rhenium Nitride Thin Films Grown by Atomic Layer Depositioncitations
- 2021Constructing Spacecraft Components Using Additive Manufacturing and Atomic Layer Deposition : First Steps for Integrated Electric Circuitrycitations
- 2021Atomic Layer Deposition of 2D Metal Dichalcogenides for Electronics, Catalysis, Energy Storage, and Beyondcitations
- 2021Self-Aligned Thin-Film Patterning by Area-Selective Etching of Polymerscitations
- 2021Self-Aligned Thin-Film Patterning by Area-Selective Etching of Polymerscitations
- 2021Oxidative MLD of Conductive PEDOT Thin Films with EDOT and ReCl5 as Precursorscitations
- 2021Oxidative MLD of Conductive PEDOT Thin Films with EDOT and ReCl5 as Precursorscitations
- 2021Highly Material Selective and Self-Aligned Photo-assisted Atomic Layer Deposition of Copper on Oxide Materialscitations
- 2021Constructing Spacecraft Components Using Additive Manufacturing and Atomic Layer Deposition:First Steps for Integrated Electric Circuitrycitations
- 2021Constructing Spacecraft Components Using Additive Manufacturing and Atomic Layer Depositioncitations
- 2021Highly conductive and stable Co9S8 thin films by atomic layer deposition : from process development and film characterization to selective and epitaxial growthcitations
- 2021Atomic Layer Deposition of Rhenium Disulfidecitations
- 2021Combining Experimental and DFT Investigation of the Mechanism Involved in Thermal Etching of Titanium Nitride Using Alternate Exposures of NbF5 and CCl4, or CCl4 Onlycitations
- 2021Constructing Spacecraft Components Using Additive Manufacturing and Atomic Layer Deposition: First Steps for Integrated Electric Circuitrycitations
- 2021Highly conductive and stable Co9S8 thin films by atomic layer depositioncitations
- 2020In situ reaction mechanism study on atomic layer deposition of intermetallic Co3Sn2 thin filmscitations
- 2020Atomic Layer Deposition of Nickel Nitride Thin Films using NiCl2(TMPDA) and Tert‐Butylhydrazine as Precursorscitations
- 2020Atomic Layer Deposition of Intermetallic Co3Sn2 and Ni3Sn2 Thin Filmscitations
- 2020Photoassisted atomic layer deposition of oxides employing alkoxides as single-source precursorscitations
- 2020Magnetic properties and resistive switching in mixture films and nanolaminates consisting of iron and silicon oxides grown by atomic layer depositioncitations
- 2020Atomic Layer Deposition of PbS Thin Films at Low Temperaturescitations
- 2020Van der Waals epitaxy of continuous thin films of 2D materials using atomic layer deposition in low temperature and low vacuum conditionscitations
- 2020Atomic Layer Deposition and Performance of ZrO2-Al2O3 Thin Filmscitations
- 2020Photocatalytic and Gas Sensitive Multiwalled Carbon Nanotube/TiO2-ZnO and ZnO-TiO2 Composites Prepared by Atomic Layer Depositioncitations
- 2020Controlling Atomic Layer Deposition of 2D Semiconductor SnS(2)by the Choice of Substratecitations
- 2019As2S3 thin films deposited by atomic layer depositioncitations
- 2019Low-Temperature Wafer-Scale Deposition of Continuous 2D SnS2 Filmscitations
- 2019Crystalline tungsten sulfide thin films by atomic layer deposition and mild annealingcitations
- 2019Atomic Layer Deposition of Nickel Nitride Thin Films using NiCl2(TMPDA) and Tert‐Butylhydrazine as Precursorscitations
- 2019Nickel Germanide Thin Films by Atomic Layer Depositioncitations
- 2019Review Articlecitations
- 2019Titania Nanotubes/Hydroxyapatite Nanocomposites Produced with the Use of the Atomic Layer Deposition Technique : Estimation of Bioactivity and Nanomechanical Propertiescitations
- 2019Atomic layer deposition of cobalt(II) oxide thin films from Co(BTSA)(2)(THF) and H2Ocitations
- 2019Atomic Layer Deposition of Intermetallic Co3Sn2 and Ni3Sn2 Thin Filmscitations
- 2019Photoassisted atomic layer deposition of oxides employing alkoxides as single-source precursorscitations
- 2019Photoassisted atomic layer deposition of oxides employing alkoxides as single-source precursorscitations
- 2019Titania Nanotubes/Hydroxyapatite Nanocomposites Produced with the Use of the Atomic Layer Deposition Techniquecitations
- 2019Atomic Layer Deposition of Photoconductive Cu2O Thin Filmscitations
- 2019Atomic Layer Deposition of Crystalline MoS2 Thin Films : New Molybdenum Precursor for Low-Temperature Film Growthcitations
- 2019Atomic Layer Deposition of PbI₂ Thin Filmscitations
- 2019Intercalation of Lithium Ions from Gaseous Precursors into beta-MnO2 Thin Films Deposited by Atomic Layer Depositioncitations
- 2019Atomic Layer Deposition of Emerging 2D Semiconductors, HfS2 and ZrS2, for Optoelectronicscitations
- 2019Atomic Layer Deposition of Molybdenum and Tungsten Oxide Thin Films Using Heteroleptic Imido-Amidinato Precursors : Process Development, Film Characterization, and Gas Sensing Propertiescitations
- 2019Intercalation of Lithium Ions from Gaseous Precursors into β-MnO 2 Thin Films Deposited by Atomic Layer Depositioncitations
- 2019Toward epitaxial ternary oxide multilayer device stacks by atomic layer depositioncitations
- 2018Low-Temperature Wafer-Scale Deposition of Continuous 2D SnS2 Filmscitations
- 2018Rhenium Metal and Rhenium Nitride Thin Films Grown by Atomic Layer Depositioncitations
- 2018Atomic layer deposition of crystalline molybdenum oxide thin films and phase control by post-deposition annealingcitations
- 2018Atomic layer deposition of crystalline molybdenum oxide thin films and phase control by post-deposition annealingcitations
- 2018Atomic layer deposition of lanthanum oxide with heteroleptic cyclopentadienyl-amidinate lanthanum precursor - Effect of the oxygen source on the film growth and propertiescitations
- 2018Towards space-grade 3D-printed, ALD-coated small satellite propulsion components for fluidicscitations
- 2018Adhesion and mechanical properties of nanocrystalline hydroxyapatite coating obtained by conversion of atomic layer-deposited calcium carbonate on titanium substratecitations
- 2018Metal Fluorides as Lithium-Ion Battery Materials: An Atomic Layer Deposition Perspectivecitations
- 2018Metal oxide multilayer hard mask system for 3D nanofabricationcitations
- 2018Atomic Layer Deposition of Zirconium Dioxide from Zirconium Tetraiodide and Ozonecitations
- 2018Atomic Layer Deposition of Rhenium Disulfidecitations
- 2018Atomic Layer Deposition and Performance of ZrO2-Al2O3 Thin Filmscitations
- 2018Atomic Layer Deposition and Properties of HfO2-Al2O3 Nanolaminatescitations
- 2018Diamine Adduct of Cobalt(II) Chloride as a Precursor for Atomic Layer Deposition of Stoichiometric Cobalt(II) Oxide and Reduction Thereof to Cobalt Metal Thin Filmscitations
- 2018Atomic Layer Deposition of Molybdenum and Tungsten Oxide Thin Films Using Heteroleptic Imido-Amidinato Precursorscitations
- 2017As2S3 thin films deposited by atomic layer depositioncitations
- 2017Thermal Atomic Layer Deposition of Continuous and Highly Conducting Gold Thin Filmscitations
- 2017Atomic layer deposition of tin oxide thin films from bis[bis(trimethylsilyl)amino]tin(II) with ozone and watercitations
- 2017(Invited) Photo-Assisted ALDcitations
- 2017Atomic Layer Deposition of Zinc Glutarate Thin Filmscitations
- 2017Low-Temperature Atomic Layer Deposition of Low-Resistivity Copper Thin Films Using Cu(dmap)(2) and Tertiary Butyl Hydrazinecitations
- 2017Atomic layer deposited protective layerscitations
- 2017Atomic Layer Deposition of Crystalline MoS2 Thin Filmscitations
- 2017Studies on Thermal Atomic Layer Deposition of Silver Thin Filmscitations
- 2017Preparation of Lithium Containing Oxides by the Solid State Reaction of Atomic Layer Deposited Thin Filmscitations
- 2016Potential gold(I) precursors evaluated for atomic layer depositioncitations
- 2016Atomic Layer Deposition (ALD) grown thin films for ultra-fine pitch pixel detectorscitations
- 2016Atomic layer deposition of aluminum oxide on modified steel substratescitations
- 2016Effect of precursor chemistry on residual stress of ALD Al 2 O 3 and TiO 2 films
- 2016Heteroleptic Cyclopentadienyl-Amidinate Precursors for Atomic Layer Deposition (ALD) of Y, Pr, Gd, and Dy Oxide Thin Filmscitations
- 2016Electric and Magnetic Properties of ALD-Grown BiFeO3 Filmscitations
- 2016Atomic Layer Deposition of Metal Phosphates and Lithium Silicates
- 2016The role of surface preparation in corrosion protection of copper with nanometer-thick ALD alumina coatingscitations
- 2016Structure-Dependent Mechanical Properties of ALD-Grown Nanocrystalline BiFeO3 Multiferroicscitations
- 2016Structure-Dependent Mechanical Properties of ALD-Grown Nanocrystalline BiFeO3 Multiferroicscitations
- 2016Atomic Layer Deposition of Iridium Thin Films Using Sequential Oxygen and Hydrogen Pulsescitations
- 2016Scalable Route to the Fabrication of CH3NH3PbI3 Perovskite Thin Films by Electrodeposition and Vapor Conversion.citations
- 2016Highly conformal TiN by atomic layer deposition:growth and characterization
- 2016Nucleation and conformality of iridium and iridium oxide thin films grown by atomic layer depositioncitations
- 2016Bismuth iron oxide thin films using atomic layer deposition of alternating bismuth oxide and iron oxide layerscitations
- 2015Atomic layer deposition of zirconium dioxide from zirconium tetrachloride and ozonecitations
- 2015(Et3Si)2Se as a precursor for atomic layer deposition: growth analysis of thermoelectric Bi2Se3citations
- 2015Impedance spectroscopy study of the unipolar and bipolar resistive switching states of atomic layer deposited polycrystalline ZrO2 thin filmscitations
- 2015Mechanical properties of aluminum, zirconium, hafnium and tantalum oxides and their nanolaminates grown by atomic layer depositioncitations
- 2015Studies on atomic layer deposition of IRMOF-8 thin filmscitations
- 2015Conduction and stability of holmium titanium oxide thin films grown by atomic layer depositioncitations
- 2015Selective etching of focused gallium ion beam implanted regions from silicon as a nanofabrication methodcitations
- 2015Atomic Layer Deposition and Characterization of Bi2Te3 Thin Filmscitations
- 2015(Et3Si)(2)Se as a precursor for atomic layer depositioncitations
- 2014Combining focused ion beam and atomic layer deposition in nanostructure fabricationcitations
- 2014Atomic Layer Deposition of Groups 4 and 5 Transition Metal Oxide Thin Filmscitations
- 2014Continuous-Wave Laser Annealing of a Si/SiO2 Superlatticecitations
- 2014Interface control of atomic layer deposited oxide coatings by filtered cathodic arc deposited sublayers for improved corrosion protectioncitations
- 2014Modification of Hematite Electronic Properties with Trimethyl Aluminum to Enhance the Efficiency of Photoelectrodescitations
- 2014Holmium and titanium oxide nanolaminates by atomic layer depositioncitations
- 2014Sealing of Hard CrN and DLC Coatings with Atomic Layer Depositioncitations
- 2014Atomic Layer Deposition of Noble Metals and Their Oxidescitations
- 2014Heteroleptic Precursors for Atomic Layer Depositioncitations
- 2014Metal oxide films
- 2013Tantalum oxide nanocoatings prepared by atomic layer and filtered cathodic arc deposition for corrosion protection of steelcitations
- 2013Atomic Layer Deposition and Characterization of Vanadium Oxide Thin Filmscitations
- 2013Studies on atomic layer deposition of MOF-5 thin filmscitations
- 2013Studies on atomic layer deposition of MOF-5 thin filmscitations
- 2013AlxTayOz Mixture Coatings Prepared Using Atomic Layer Deposition for Corrosion Protection of Steelcitations
- 2013Low temperature atomic layer deposition of noble metals using ozone and molecular hydrogen as reactantscitations
- 2013Hydrogen-argon plasma pre-treatment for improving the anti-corrosion properties of thin Al2O3 films deposited using atomic layer deposition on steelcitations
- 2012Study of amorphous lithium silicate thin films grown by atomic layer depositioncitations
- 2012Lithium Phosphate Thin Films Grown by Atomic Layer Depositioncitations
- 2012Preparation of regularly structured nanotubular TiO2 thin films on ITO and their modification with thin ALD-grown layerscitations
- 2012Optical and Dielectric Characterization of Atomic Layer Deposited Nb2O5 Thin Filmscitations
- 2011Failure mechanism of thin Al2O3 coatings grown by atomic layer deposition for corrosion protection of carbon steelcitations
- 2011Corrosion Protection of Steel with Oxide Nanolaminates Grown by Atomic Layer Depositioncitations
- 2011Iridium metal and iridium oxide thin films grown by atomic layer deposition at low temperaturescitations
- 2011Electrochemical and time-of-flight secondary ion mass spectrometry analysis of ultra-thin metal oxide (Al2O3 and Ta2O5) coatings deposited by atomic layer deposition on stainless steelcitations
- 2011Electrochemical and time-of-flight secondary ion mass spectrometry analysis of ultra-thin metal oxide (Al2O3 and Ta2O5) coatings deposited by atomic layer deposition on stainless steelcitations
- 2011Atomic Layer Deposition of GeTe
- 2011Atomic Layer Deposition and Characterization of Aluminum Silicate Thin Films for Optical Applicationscitations
- 2011Crystal structures and thermal properties of some rare earth alkoxides with tertiary alcoholscitations
- 2011Low-temperature atomic layer deposition of Al2O3 thin coatings for corrosion protection of steelcitations
- 2010High temperature atomic layer deposition of Ruthenium from N,N-dimethyl-1-ruthenocenylethylaminecitations
- 2010Silver Coated Platinum Core–Shell Nanostructures on Etched Si Nanowires: Atomic Layer Deposition (ALD) Processing and Application in SERScitations
- 2010Atomic layer deposition and characterization of zirconium oxide-erbium oxide nanolaminatescitations
- 2010Selective-area atomic layer deposition using poly(vinyl pyrrolidone) as a passivation layercitations
- 2009Electrical properties of thin zirconium and hafnium oxide high-k gate dielectrics grown by atomic layer deposition from cyclopentadienyl and ozone precursorscitations
- 2009Atomic layer deposition of high-k oxides of the group 4 metals for memory applicationscitations
- 2009Atomic layer deposition of metal tellurides and selenides using alkylsilyl compounds of tellurium and seleniumcitations
- 2009Behavior of zirconium oxide films processed from novel monocyclopentadienyl precursors by atomic layer depositioncitations
- 2009Metallic Ir, IrO2 and Pt Nanotubes and Fibers by Electrospinning and Atomic Layer Deposition
- 2009The preparation of reusable magnetic and photocatalytic composite nanofibers by electrospinning and atomic layer depositioncitations
- 2009Advanced thin film technology for ultrahigh resolution x-ray microscopycitations
- 2009Irradiation effect on dielectric properties of hafnium and gadolinium oxide gate dielectricscitations
- 2009Alkylsilyl compounds of selenium and tellurium
- 2009Study on atomic layer deposition of amorphous rhodium oxide thin filmscitations
- 2009Atomic layer deposition of iridium thin films by consecutive oxidation and reduction stepscitations
- 2009Explosive crystallization in atomic layer deposited mixed titanium oxidescitations
- 2008Atomic layer deposition of iridium oxide thin films from Ir(acac)₃ and ozonecitations
- 2008Coating of highly porous fiber matrices by atomic layer depositioncitations
- 2008Atomic layer deposition of MgF2 thin films using TaF5 as a novel fluorine sourcecitations
- 2008Identification of spatial localization and energetic position of electrically active defects in amorphous high-k dielectrics for advanced devicescitations
- 2008Atomic layer deposition of platinum oxide and metallic platinum thin films from Pt(acac)₂ and ozonecitations
- 2008Selective-area atomic layer deposition using poly(methyl methacrylate) films as maskcitations
- 2007Study of a novel ALD process for depositing MgF2 thin filmscitations
- 2007Radical-enhanced atomic layer deposition of silver thin films using phosphine-adducted silver carboxylatescitations
- 2007Hollow inorganic nanospheres and nanotubes with tunable wall thicknesses by atomic layer deposition on self-assembled polymeric templatescitations
- 2007Hollow inorganic nanospheres and nanotubes with tunable wall thicknesses by atomic layer deposition on self-assembled polymeric templatescitations
- 2007Radical enhanced atomic layer deposition of titanium dioxidecitations
- 2007Atomic layer deposition in nanotechnology applications
- 2007Ruthenium/aerogel nanocomposites via atomic layer depositioncitations
- 2007Atomic layer deposition of titanium disulfide thin filmscitations
- 2006Atomic layer deposition and properties of lanthanum oxide and lanthanum-aluminum oxide filmscitations
- 2006Atomic layer deposition of ferroelectric bismuth titanate Bi4Ti3O12 thin filmscitations
- 2006Free-standing inductive grid filter for infrared radiation rejectioncitations
- 2005Aging of electroluminescent ZnScitations
- 2005Radical-Enhanced Atomic Layer Deposition of Metallic Copper Thin Filmscitations
- 2005New approach to the ALD of Bismuth silicatescitations
- 2005Atomic layer deposition of hafnium dioxide thin films from hafnium tetrakis(dimethylamide) and watercitations
- 2005Thin film deposition methods for CulnSe(2) solar cellscitations
- 2005Atomic layer deposition of molybdenum nitride thin films for Cu metallizationscitations
- 2004Atomic layer deposition of noble metalscitations
- 2001Electrochemical quartz crystal microbalance study of the electrodeposition mechanisms of CuInSe 2 thin filmscitations
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