693.932 PEOPLE
| People | Locations | Statistics |
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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Kiihamäki, Jyrki
VTT Technical Research Centre of Finland
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (8/8 displayed)
- 2013Micromechanical resonator array and method for manufacturing thereof
- 2010Low-Temperature Processes for MEMS Device Fabricationcitations
- 2009Etching of Sacrificial CVD Silicon Dioxide with Anhydrous HF Vaporcitations
- 2005Fabrication of SOI micromechanical devices
- 2005Fabrication of SOI micromechanical devices:Dissertation
- 2004Electrical and mechanical properties of micromachined vacuum cavitiescitations
- 2003"Plug-up" - A new concept for fabricating SOI MEMS devicescitations
- 2000Deceleration of silicon etch rate at high aspect ratioscitations
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