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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Sobola, Dinara
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (24/24 displayed)
- 2024Analysis of processing efficiency, surface, and bulk chemistry, and nanomechanical properties of the Monel<sup>®</sup> alloy 400 after ultrashort pulsed laser ablationcitations
- 2024Optical Properties of Yttrium Ferrite Films Prepared by Pulse Laser Deposition
- 2024Characterization of field emission from oxidized copper emitterscitations
- 2024Optical Properties of YttriumOrthoferrite Films Prepared by PlasmaLaser Deposition
- 2024Optical and electrical performance of translucent BaTiO3-BaSnO3 ceramicscitations
- 2024Comprehensive analysis of charge carriers dynamics through the honeycomb structure of graphite thin films and polymer graphite with applications in cold field emission and scanning tunneling microscopycitations
- 2024Analysis of processing efficiency, surface, and bulk chemistry, and nanomechanical properties of the Monel® alloy 400 after ultrashort pulsed laser ablationcitations
- 2024Field Ion Microscopy of Tungsten Nano-Tips Coated with Thin Layer of the EpoxyResin
- 2023Exploring the Piezoelectric Properties of Bismuth Ferrite Thin Films Using Piezoelectric Force Microscopy: A Case Studycitations
- 2023Piezo-Enhanced Photocatalytic Activity of the Electrospun Fibrous Magnetic PVDF/BiFeO3 Membranecitations
- 2023Electrical characteristics of different concentration of silica nanoparticles embedded in epoxy resincitations
- 2022Nanoscale surface dynamics of RF-magnetron sputtered CrCoCuFeNi high entropy alloy thin filmscitations
- 2022Nanoscale surface dynamics of RF-magnetron sputtered CrCoCuFeNi high entropy alloy thin filmscitations
- 2022Characterization and Evaluation of Engineered Coating Techniques for Different Cutting Tools - Reviewcitations
- 2022Characterization and Evaluation of Engineered Coating Techniques for Different Cutting Tools-Reviewcitations
- 2022Advances in sustainable grinding of different types of the titanium biomaterials for medical applicationscitations
- 2022Multiferroic/Polymer Flexible Structures Obtained by Atomic Layer Depositioncitations
- 2022Morphotropic Phase Boundary Enhanced Photocatalysis in Sm Doped BiFeO3citations
- 2021PVDF Fibers Modification by Nitrate Salts Dopingcitations
- 2021Case Study of Polyvinylidene Fluoride Doping by Carbon Nanotubescitations
- 2021Morphological features in aluminum nitride epilayers prepared by magnetron sputtering ; Morfologické detaily v AlN epivrstvách připravených magnetronovým napařovánímcitations
- 2021Characterization of Polyvinylidene Fluoride (PVDF) Electrospun Fibers Doped by Carbon Flakescitations
- 2021Field emission properties of polymer graphite tips prepared by membrane electrochemical etchingcitations
- 2020Scanning proximal microscopy study of the thin layers of silicon carbide aluminum nitride solid solution manufactured by fast sublimation epitaxy ; Použitá sondového rastrovacího mikroskopu pro studium tenkých vrstev karbidu křemíku a nitridu hliníku vyrobených rychlou sublimační epitaxí
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article
Morphological features in aluminum nitride epilayers prepared by magnetron sputtering ; Morfologické detaily v AlN epivrstvách připravených magnetronovým napařováním
Abstract
The aim of this study is to characterize the surface topography of aluminum nitride (AlN) epilayers prepared by magnetron sputtering using the surface statistical parameters, according to ISO 25178-2:2012. To understand the effect of temperature on the epilayer structure, the surface topography was investigated through atomic force microscopy (AFM). AFM data and analysis of surface statistical parameters indicated the dependence of morphology of the epilayers on their growth conditions. The surface statistical parameters provide important information about surface texture and are useful for manufacturers in developing AlN thin films with improved surface characteristics. These results are also important for understanding the nanoscale phenomena at the contacts between rough surfaces, such as the area of contact, the interfacial separation, and the adhesive and frictional properties. ; Cílem této studie je charakterizovat topografii povrchu AlN epivrstev připravených pomocí magnetronového napařování. K tomu využíváme statistické parametry povrchu dle normy ISO 25178-2:2012. Abychom pochopili vliv teploty, byla topografie povrchu provedena pomocí AFM mikroskopu. Data z AFM mikroskopu a analýza statistických parametrů povrchu ukazují závislost morfologie epivrstev na podmínkách jejich růstu. Statistické parametry poskytují důležité informace o textuře povrchu a jsou významné pro výrobu tenkých vrstev AlN se zlepšenými charakteristikami povrchu. Tyto výsledky jsou také důležité pro pochopení jevů v nanoměřítku v kontaktních bodech drsných povrchů - oblasti kontaktu, separace rozhraní a o adhesivních a frikčních vlastnostech.