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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Dallaev, Rashid
Brno University of Technology
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (10/10 displayed)
- 2024Optical Properties of Yttrium Ferrite Films Prepared by Pulse Laser Deposition
- 2024Optical Properties of YttriumOrthoferrite Films Prepared by PlasmaLaser Deposition
- 2024Comprehensive analysis of charge carriers dynamics through the honeycomb structure of graphite thin films and polymer graphite with applications in cold field emission and scanning tunneling microscopycitations
- 2023Overview of the Current State of Flexible Solar Panels and Photovoltaic Materialscitations
- 2021PVDF Fibers Modification by Nitrate Salts Dopingcitations
- 2021SEM imaging and XPS characterization of doped PVDF fiberscitations
- 2021Case Study of Polyvinylidene Fluoride Doping by Carbon Nanotubescitations
- 2021Characterization of Polyvinylidene Fluoride (PVDF) Electrospun Fibers Doped by Carbon Flakescitations
- 2021Field emission properties of polymer graphite tips prepared by membrane electrochemical etchingcitations
- 2021Structural Charachterization Of Aln Thin Films Obtained On Silicon Surface By Pe-Ald
Places of action
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conferencepaper
Structural Charachterization Of Aln Thin Films Obtained On Silicon Surface By Pe-Ald
Abstract
The aim of this study is to investigate the hydrogen impregnations in AlN thin films deposited using plasma-enhanced atomic layer deposition technique. As of date, there is an apparent gap in the literature regarding the matter of hydrogen impregnation within the AlN layers. Hydrogen is a frequent contaminant and its content has detrimental effect on the quality of resulted layer, which is why it is relevant to investigate this particular contaminant and try to eliminate or at least minimize its quantity. Within the films hydrogen commonly forms amino or imide types of bonds (–NH2, - NH). There is only a handful of analytical methods enabling the detection of hydrogen. This particular study comprises two of them – Fourier-transform infrared spectroscopy (FTIR) and second ion-mass spectrometry (SIMS). XPS analysis has also been included to examine the surface nature and structural imperfections of the grown layer.