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Naji, M. |
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Motta, Antonella |
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Aletan, Dirar |
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Mohamed, Tarek |
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Ertürk, Emre |
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Taccardi, Nicola |
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Kononenko, Denys |
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Petrov, R. H. | Madrid |
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Alshaaer, Mazen | Brussels |
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Bih, L. |
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Casati, R. |
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Muller, Hermance |
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Kočí, Jan | Prague |
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Šuljagić, Marija |
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Kalteremidou, Kalliopi-Artemi | Brussels |
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Azam, Siraj |
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Ospanova, Alyiya |
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Blanpain, Bart |
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Ali, M. A. |
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Popa, V. |
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Rančić, M. |
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Ollier, Nadège |
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Azevedo, Nuno Monteiro |
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Landes, Michael |
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Rignanese, Gian-Marco |
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Skibiński, Jakub
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (7/7 displayed)
- 2024Bioactive hydrogel based on collagen and hyaluronic acid enriched with freeze-dried sheep placenta for wound healing suportcitations
- 2021Supporting ionic conductivity of Li2CO3/K2CO3 molten carbonate electrolyte by using yttria stabilized zirconia matrixcitations
- 2020Metallic foam supported electrodes for molten carbonate fuel cellscitations
- 2018Investigation of the relationship between morphology and permeability for open-cell foams using virtual materials testingcitations
- 2017Design of Reservoir Recognition Technique Component - Open Porosity in Non-Polarizing Electrodes
- 2016Numerical simulations of epitaxial growth in MOVPE reactor as a tool for aluminum nitride growth optimization
- 2016Design of open-porous materials for high-temperature fuel cells
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article
Design of open-porous materials for high-temperature fuel cells
Abstract
The present study concerns numerical simulations and experimental measurements on the influence of inlet gas mass flow rate on the growth rate of aluminum nitride crystals in Metalorganic Vapor Phase Epitaxy reactor model AIX-200/4RF-S. The aim of this study was to design the optimal process conditions for obtaining the most homogeneous product. Since there are many agents influencing reactions relating to crystal growth such as temperature, pressure, gas composition and reactor geometry, it is difficult to design an optimal process. Variations of process pressure and hydrogen mass flow rates have been considered. Since it is impossible to experimentally determine the exact distribution of heat and mass transfer inside the reactor during crystal growth, detailed 3D modeling has been used to gain insight into the process conditions. Numerical simulations increase the understanding of the epitaxial process by calculating heat and mass transfer distribution during the growth of aluminum nitride crystals. Including chemical reactions in the numerical model enables the growth rate of the substrate to be calculated. The present approach has been applied to optimize homogeneity of AlN film thickness and its growth rate.