| People | Locations | Statistics |
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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Cauwe, Maarten
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (13/13 displayed)
- 2020Development of an active high-density transverse intrafascicular micro-electrode probecitations
- 2020The use of ALD layers for hermetic encapsulation in the development of a flexible implantable micro electrode for neural recording and stimulation
- 2020The use of ALD layers for hermetic encapsulation in the development of a flexible implantable micro electrode for neural recording and stimulation
- 2019FITEP : a Flexible Implantable Thin Electronic Package platform for long term implantation applications, based on polymer and ceramic ALD multilayers
- 2019FITEP : a Flexible Implantable Thin Electronic Package platform for long term implantation applications, based on polymer and ceramic ALD multilayers
- 2019Ultra-long-term reliable encapsulation using an atomic layer deposited Hfo2/Al2o3/Hfo2 triple-interlayer for biomedical implantscitations
- 2019FITEP: a Flexible Implantable Thin Electronic Package platform for long term implantation applications, based on polymer and ceramic ALD multilayers
- 2017Ultra-thin biocompatible implantable chip for bidirectional communication with peripheral nervescitations
- 2017Ultra-thin biocompatible implantable chip for bidirectional communication with peripheral nervescitations
- 2017Accelerated hermeticity testing of biocompatible moisture barriers used for encapsulation of implantable medical devices
- 2015Sensitivity analysis of broadband on-wafer dielectric spectroscopy of yeast cell suspensions up to 110 GHzcitations
- 2013Parylene C for hermetic and flexible encapsulation of interconnects and electronic components
- 2011Frequency-dependent substrate characterization via an iterative pole search algorithmcitations
Places of action
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document
Parylene C for hermetic and flexible encapsulation of interconnects and electronic components
Abstract
Flexible electronics are of a great interest for wearable and implantable medical devices due to their conformality with the body, compared to electronics made on rigid carriers. Packaging of such electronics needs to offer sufficient flexibility and in addition, has to provide good protection for the electronics inside, also in humid and harsh environments, to prevent device failure due to corrosion. Parylene C is a popular polymer due to its interesting diffusion barrier properties. Parylene C coatings are also extremely conformal, hence it offers the possibility to be used as flexibleprotecting encapsulation for electronic components andinterconnects. In order to provide sufficient mechanical support for the electronic circuit, a second encapsulation in PDMS will be performed. In our work, we study the barrier properties of Parylene for long time exposure to moisture and biofluids. Since adhesion is a very important parameter to prevent corrosion, this property is studied in detail. Various substrates and various adhesion promotion treatments are evaluated. Furthermore, copper interconnects coated with parylene C are immersed in biofluids at 37 C to study corrosion. Accelerated testing is also performed at 70 C to mimic long time exposure in a harsh, humid environment. Since the Parylene barrier layers are typically 5-15 micron thick, they are highly flexible, and hence they are interesting barriers to be used in flexible/stretchable electronics. Therefore, special attention is given to the evaluation of barrier properties when Parylene is bended and stretched.