| People | Locations | Statistics |
|---|---|---|
| Naji, M. |
| |
| Motta, Antonella |
| |
| Aletan, Dirar |
| |
| Mohamed, Tarek |
| |
| Ertürk, Emre |
| |
| Taccardi, Nicola |
| |
| Kononenko, Denys |
| |
| Petrov, R. H. | Madrid |
|
| Alshaaer, Mazen | Brussels |
|
| Bih, L. |
| |
| Casati, R. |
| |
| Muller, Hermance |
| |
| Kočí, Jan | Prague |
|
| Šuljagić, Marija |
| |
| Kalteremidou, Kalliopi-Artemi | Brussels |
|
| Azam, Siraj |
| |
| Ospanova, Alyiya |
| |
| Blanpain, Bart |
| |
| Ali, M. A. |
| |
| Popa, V. |
| |
| Rančić, M. |
| |
| Ollier, Nadège |
| |
| Azevedo, Nuno Monteiro |
| |
| Landes, Michael |
| |
| Rignanese, Gian-Marco |
|
Kovacevic, Eva
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (11/11 displayed)
- 2021Characterization of functionalized coatings prepared from pulsed plasma polymerizationcitations
- 2019PANI film on carbon nanowalls: synthesis and analysis
- 2019PANI film on carbon nanowalls: synthesis and analysis
- 2017Optical diagnostics of dusty plasmas during nanoparticle growthcitations
- 2015Growth process of nanosized aluminum thin films by pulsed laser deposition for fluorescence enhancementcitations
- 2014In situ Raman spectroscopy for growth monitoring of vertically aligned multiwallcarbon nanotubes in plasma reactorcitations
- 2013Plasma-based growth and functionalization of CNT from first steps to technological applications
- 2013Plasma physical and plasma chemical aspects of nanoparticle formation in hydrocarbon plasmas
- 2013Plasma physical and plasma chemical aspects of nanoparticleformation in hydrocarbon plasmas
- 2010Characterization of a low pressure capacitively coupled RF discharge in N<sub>2</sub>-H<sub>2</sub>
- 2010Characterization of a low pressure capacitively coupled RF discharge in N 2 -H 2
Places of action
| Organizations | Location | People |
|---|
document
Characterization of a low pressure capacitively coupled RF discharge in N<sub>2</sub>-H<sub>2</sub>
Abstract
Discharges operated in mixtures of hydrogen and nitrogen are nowadays used as a source of active species for various kinds of applications from etching of low-k materials to modifications of polymer surfaces for biomedical applications. Moreover these kinds of discharges can provide information relevant for studies of planetary atmospheres. The present work involves the study of a low pressure capacitively coupled RF discharge operated in variable mixtures of N<sub>2</sub> and H<sub>2</sub> at variable pressures and powers. The systematic measurements of electron density, RF voltage, self bias and the observation of several molecular bands by means of optical emission spectroscopy gave us important information about basic processes relevant for the understanding and application of such kind of discharges. The experimental results are interpreted by means of a hybrid model, namely the effect of admixing hydrogen into a N<sub>2</sub> discharge.