| People | Locations | Statistics |
|---|---|---|
| Naji, M. |
| |
| Motta, Antonella |
| |
| Aletan, Dirar |
| |
| Mohamed, Tarek |
| |
| Ertürk, Emre |
| |
| Taccardi, Nicola |
| |
| Kononenko, Denys |
| |
| Petrov, R. H. | Madrid |
|
| Alshaaer, Mazen | Brussels |
|
| Bih, L. |
| |
| Casati, R. |
| |
| Muller, Hermance |
| |
| Kočí, Jan | Prague |
|
| Šuljagić, Marija |
| |
| Kalteremidou, Kalliopi-Artemi | Brussels |
|
| Azam, Siraj |
| |
| Ospanova, Alyiya |
| |
| Blanpain, Bart |
| |
| Ali, M. A. |
| |
| Popa, V. |
| |
| Rančić, M. |
| |
| Ollier, Nadège |
| |
| Azevedo, Nuno Monteiro |
| |
| Landes, Michael |
| |
| Rignanese, Gian-Marco |
|
Sadun, Claudia
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (1/1 displayed)
Places of action
| Organizations | Location | People |
|---|
article
PECVD a-C:H films for STW resonant devices
Abstract
lasma polymeric hydrogenated amorphous carbon (a-C:H) coatings have been found to be a promising material for use in surface transverse acoustic wave (STW) resonator employed as humidity sensor. The tailoring of coating properties has been easily obtained by variation of CH 4 percentage in CH 4 –Ar mixture that enables to tune the response of polymer-coated STW resonator. Specifically, the optimum sensing characteristics of the STW resonator has been exhibited by coating obtained at 50% of CH 4 percentage. The correlation between the device sensitivity and the material properties, as determined by small angle X-ray scattering (SAXS), X-ray reflectivity (XRR), ellipsometry and Fourier infrared spectroscopy (FTIR) measurements, permits us to highlight the sensing mechanism of the active a-C:H coatings. The porosity has been considered the main effect on the enhancement of the sensor response.