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Macfarquhar, Stuart, James
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Publications (4/4 displayed)
- 2020Laser-driven phase segregation and tailoring of compositionally graded microstructures in Si-Ge nanoscale thin filmscitations
- 2020Laser processed semiconductors for integrated photonic devices
- 2020Laser-written silicon-germanium alloy microstructures with tunable compositionally graded profiles
- 2019Laser processing of amorphous semiconductors on planar substrates for photonic and optoelectronic applications
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Laser processed semiconductors for integrated photonic devices
Abstract
We report results of laser processing of amorphous silicon and silicon-germanium semiconductor materials for the production of integrated photonic platforms. As the materials are deposited and processed at low temperatures, they are flexible, low cost, and suitable for multi-layer integration with other photonic or electronic layers. We demonstrate the formation of waveguides via crystallization of pre-patterned silicon components and functional microstructures through crystallization and compositional tuning of silicon-germanium alloy films. These results open a route for the fabrication of high density, multi-functional integrated optoelectronic chips.