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Zhifeng, Z.
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Understanding the structural, morphological and optical features of Mo, CrN and CrMoN sputtered films
Abstract
In recent years, researchers around the world are paying substantial efforts for the development of transition metallic nitride based solar selective surfaces due to a good combination of many properties e.g., large band-gap, excellent chemical and thermal stability, corrosion resistance, wear resistance, oxidation resistance and physical robustness. Further applications of transition metal nitride based films also include: spintronics, nonvolatile storage, microelectronic/optical/optical storage devices. In view of these facts, research interests on transition metal nitride based films have been accelerated and dedicated to the development of new species studying their properties to find potential applications in other areas. In the present study, Mo, CrN, and Mo-doped CrN (CrN:Mo) films synthesized via closed field unbalanced magnetron sputtering technique were characterised using X-ray diffraction (XRD), field emission scanning electron microscopy (FESEM), UV-Vis spectroscopy, Fourier transform infrared (FTIR) spectroscopy to study their structural,• surface morphological and optical properties. This includes prope1iies such as solar absorptance, thermal emittance, solar selectivity, complex refractive index, and complex dielectric functions. The chemical composition of these films was confirmed by EDS measurement. Structural disorder was observed in XRD spectra depending on the Mo incorporation to the CrN matrix. The XRD studies indicated crystallinity of the Mo and CrN phases were substantially increased in the CrN:Mo films and also confirmed via FESEM studies. UV-Vis spectrum (190-2500nm) of the CrN:Mo films demonstrate the highest value of solar absorptance (61%) while a substantial decline from 31.5% (CrN) to 5.6% (CrN:Mo) in the thermal emittance value, from FTIR (2.5 - 20 Jlm). Consequently, the CrN:Mo films exhibited the highest solar selectivity value of 9.55. Inclusive to the optical properties given above, the dielectric propetiies of these films were also investigated from the UV-Vis and FTIR results.