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| Naji, M. |
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| Motta, Antonella |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Petrov, R. H. | Madrid |
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| Casati, R. |
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| Kočí, Jan | Prague |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Ali, M. A. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Wiegerink, Remco
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Topics
Publications (8/8 displayed)
- 2024Microfabrication Technology for Isolated Silicon Sidewall Electrodes and Heaters
- 2024Inline and Real-Time Microfluidic Relative Permittivity Sensor Using Highly Doped Silicon Sidewall Electrodes
- 2018Micro Coriolis mass flow sensor driven by integrated PZT thin film actuators
- 2018Inline relative permittivity sensing using silicon electrodes realized in surface channel technologycitations
- 2007Biomimetic micromechanical adaptive flow-sensor arrayscitations
- 2007Cricket inspired flow-sensor arrayscitations
- 2001Platinum patterning by a modified lift-off technique and its application in a silicon load cell
- 2000Characterization of platinum lift off technique
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document
Micro Coriolis mass flow sensor driven by integrated PZT thin film actuators
Abstract
We have realized a micro Coriolis mass flow sensor that is actuated by integrated lead zirconate titanate (PZT) thin film actuators, allowing low voltage, low power actuation compared to current actuation methods. The integrated PZT thin film actuators are deposited on top of silicon-rich silicon nitride (SiRN) fluidic microchannels by pulsed laser deposition (PLD). In this paper we present the fabrication process and first characterization results, including a mass flow measurement with nitrogen flow using a Polytec MSA-400 laser Doppler vibrometer to detect the Coriolis induced motion of the sensor tube. The measurement results confirm that the sensor output is proportional to mass flow up to 14 mg/min.