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Chong, Harold
University of Southampton
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (10/10 displayed)
- 2020Laser-driven phase segregation and tailoring of compositionally graded microstructures in Si-Ge nanoscale thin filmscitations
- 2020Laser processed semiconductors for integrated photonic devices
- 2020Laser-written silicon-germanium alloy microstructures with tunable compositionally graded profiles
- 2020Multi-stack insulator to minimise threshold voltage drift in ZnO FET sensors operating in ionic solutionscitations
- 2019Laser processing of amorphous semiconductors on planar substrates for photonic and optoelectronic applications
- 2017Laser annealing of low temperature deposited silicon waveguidescitations
- 2016Large-scale nanoelectromechanical switches based on directly deposited nanocrystalline graphene on insulating substratescitations
- 2015Characterisation of nanographite for MEMS resonators
- 2015A silicon/lithium niobate hybrid photonic material platform produced by laser processing
- 2012Remote plasma enhanced atomic layer deposition of ZnO for thin film electronic applicationscitations
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document
Laser processing of amorphous semiconductors on planar substrates for photonic and optoelectronic applications
Abstract
We report results of laser processing on amorphous silicon and silicon-germanium films deposited on planar substrates. Pre-patterned a-Si waveguides were recrystallized and reflowed to enhance their material and optical properties. Formation of millimeter long crystal grains and surface roughness of 0.52 nm enable optical losses to become as low as 5.3 dB/cm. Laser-driven phase separation in the binary alloy of a-SiGe allows fabrication of composition graded microstructures with Si-rich and Ge-rich regions. A composition tuning capability of 40% was demonstrated.