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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Gao, Feng
University of Huddersfield
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (39/39 displayed)
- 2024How Photogenerated I 2 Induces I-Rich Phase Formation in Lead Mixed Halide Perovskitescitations
- 2024Harmonizing organic photovoltaics research and development among academia and industrycitations
- 2024How Photogenerated I2 Induces I-Rich Phase Formation in Lead Mixed Halide Perovskitescitations
- 2024Understanding Antiferromagnetic Coupling in Lead-Free Halide Double Perovskite Semiconductorscitations
- 2023Wide‐Bandgap Perovskite‐Inspired Materials: Defect‐Driven Challenges for High‐Performance Optoelectronicscitations
- 2023Wide-bandgap perovskite-inspired materials: defect-driven challenges for high-performance optoelectronicscitations
- 2023How Photogenerated I2 Induces I‐rich Phase Formation in Lead Mixed Halide Perovskitescitations
- 2023Critical Insight into Pretransitional Behavior and Dielectric Tunability of Relaxor Ceramicscitations
- 2023Quantum random number generation based on a perovskite light emitting diodecitations
- 2023How to GIWAXS: Grazing Incidence Wide Angle X-Ray Scattering Applied to Metal Halide Perovskite Thin Filmscitations
- 2023How to GIWAXS: Grazing Incidence Wide Angle X‐Ray Scattering Applied to Metal Halide Perovskite Thin Filmscitations
- 2023Neuromorphic computing based on halide perovskitescitations
- 2023Racial Differences in the Association of Glucagon-like Peptide 1 Agonist Use and the Progression of Monoclonal Gammopathy of Undetermined Significance to Multiple Myeloma in US Veterans with Diabetes Mellituscitations
- 2023On‐Chip Tightly Confined Guiding and Splitting of Surface Acoustic Waves Using Line Defects in Phononic Crystalscitations
- 2023Lattice Dynamics and Electron-Phonon Coupling in Double Perovskite Cs2NaFeCl6citations
- 2022Advances in solution-processed near-infrared light-emitting diodescitations
- 2022Development of a High Perfomance Gas Thermoelectric Generator (TEG) with Possibible Use of Waste Heatcitations
- 2021Advances in solution-processed near-infrared light-emitting diodescitations
- 2021In Situ Optical Studies on Morphology Formation in Organic Photovoltaic Blendscitations
- 2021In Situ Optical Studies on Morphology Formation in Organic Photovoltaic Blendscitations
- 2021In Situ Optical Studies on Morphology Formation in Organic Photovoltaic Blendscitations
- 2021The influence of the chemical structure of selected polymers on the properties of ferroelectric ceramic-polymer compositescitations
- 2021Acoustic-radiation free surface phononic crystal resonator for in-liquid low-noise gravimetric detectioncitations
- 2020Magnetizing lead-free halide double perovskitescitations
- 2020Monolithic integration of up to 40 GHz Ge photodetectors in 3μm SOIcitations
- 2019Pulsed Terahertz Emission from Solution-Processed Lead Iodide Perovskite Filmscitations
- 2019Advanced Lateral High Aspect Ratio Test Structures for Conformality Characterization by Optical Microscopy
- 2018PillarHall LHAR structure for Thin Film Conformality Measurements
- 2018Monitoring Conformality in ALD Manufacturing
- 2018Ultra-Bright Near-Infrared Perovskite Light-Emitting Diodes with Reduced Efficiency Roll-offcitations
- 2018Ultra-Bright Near-Infrared Perovskite Light-Emitting Diodes with Reduced Efficiency Roll-offcitations
- 2016Highly conformal TiN by atomic layer deposition:growth and characterization
- 2016Band structure engineering in organic semiconductorscitations
- 2016Nucleation and conformality of iridium and iridium oxide thin films grown by atomic layer depositioncitations
- 2015Microscopic silicon-based lateral high-aspect-ratio structures for thin film conformality analysiscitations
- 2015Implementation of wavelength scanning interferometry for R2R flexible PV barrier films
- 2013Infrared spectroscopy study of a poly-silicon film for optimizing the boron-implanting dosecitations
- 2011Design of Catalytically Active Cylindrical and Macroporous Gold Microelectrodescitations
- 2010Formation of nanopatterned polymer blends in photovoltaic devicescitations
Places of action
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document
Advanced Lateral High Aspect Ratio Test Structures for Conformality Characterization by Optical Microscopy
Abstract
Atomic Layer Deposition (ALD) is a key technology in 3D microelectronics enabling conformal coatings into deep microscopic trenches and high aspect ratio cavities. However‚ conformality characterization in 3D trench walls is challenging and requires sample preparation. The MEMS-based all-silicon Lateral High Aspect Ratio (LHAR) test structure‚ developed at VTT‚ named PillarHall® [1-3]‚ provides a fast and accurate substrate and characterization concept for the thin film conformality analysis [4‚5]. The most important outcome from the PillarHall® characterization is the film saturation profile‚ which provides valuable data for reaction kinetics modelling and quantifying conformality. Since the LHAR enables utilization of planar metrology instruments‚ multiple approaches are compatible.<br/><br/>In this study‚ we focus on characterization methods suitable to extract the saturation profile and show the advantage of simple optical microscopy image analysis. Studied material was prototypical ALD Al2O3 (40-50 nm thick layers) made in two separate research facilities. The study consisted of SEM/EDX planar view‚ micro-spot reflectometry and ellipsometry and optical microscopy image analyses. These experiments were carried out by two research labs and supported by leading edge optical metrology tool vendors‚ Semilab Ltd‚ JA Woollam and Filmetrics.<br/><br/>We also introduce advanced LHAR 4th generation design‚ which enables characterization of the penetration depth profile with distinct advantages. Namely‚ new pillar design enables employment of optical line scanners up to 50 µm spot sizes. Furthermore‚ internal distance indicators support positioning the characterization tools more accurately. These features are illustrated in Supplementary Material Fig S1.<br/><br/>The results show that the gray-scale optical microscopy image analysis with the thickness determination in opening area gives similar results as the reflectometry or ellipsometry line scans‚ within the accuracy limits. Optical thickness/λ of the film is a limitation for the image analysis‚ but designing the experiments properly‚ the grayscale optical micrograph can be a powerful‚ widely compatible and easy method for conformality analysis.<br/>Support from Semilab Ltd is gratefully acknowledged.<br/><br/>References<br/><br/>[1] F. Gao et al.‚ J. Vac. Sci. Technol. A Vacuum‚ Surfaces‚ Film.33‚ 010601 (2015).<br/><br/>[2] R. Puurunen and F. Gao‚ 2016. doi: 10.1109/BALD.2016.7886526<br/><br/>[3] M. Mattinen et al.‚ Langmuir‚ 32‚ 10559 (2016).<br/><br/>[4] M. Ylilammi et al.‚ J. Appl. Phys.‚ 123‚ 205301 (2018).<br/>[5] V. Cremers et al.‚ Applied Physics Reviews‚ in press (2019).