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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Mussenbrock, Thomas
Ruhr University Bochum
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (9/9 displayed)
- 2023The effects of catalyst conductivity and loading of dielectric surface structures on plasma dynamics in patterned dielectric barrier discharges
- 2023The effects of catalyst conductivity and loading of dielectric surface structures on plasma dynamics in patterned dielectric barrier dischargescitations
- 2022Nanoporous SiOx plasma polymer films as carrier for liquid‐infused surfacescitations
- 2018Improved homogeneity of plasma and coating properties using a lance matrix gas distribution in MW-PECVDcitations
- 2016Influence of ion energy and ion-to-growth flux ratio on PVD coatings in a multi-frequency capacitively coupled plasma
- 2013Continuum and Kinetic Simulations of the Neutral Gas Flow in an Industrial Physical Vapor Deposition Reactor
- 2013Kinetic simulation of neutral particle transport in sputtering processes
- 2013Continuum and kinetic simulations of the neutral gas flow in an industrial physical vapor deposition reactor
- 2012A first step toward the modeling of instabilities in high power pulse magnetron sputtering plasmas
Places of action
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document
A first step toward the modeling of instabilities in high power pulse magnetron sputtering plasmas
Abstract
High Power Pulsed Magnetron Sputtering (HPPMS) is a novel Ionized Physical Vapor Deposition (IPVD) technique, able to achieve an ultra dense plasma with a high ionization degree among the sputtered atoms. This is accomplished by applying a large bias voltage to the target in short pulses with low duty cycle. Several authors have recently reported the presence of rotating structures during a HPPMS discharge. According to the experimental observations, these emissions peaks rotate with constant angular velocity φ, when the discharge parameters are held constant. Here, we attempt to describe these structures with a collection of simplified models with increasing levels of detail. We start by solving analytically a system of 1D Advection-Diffusion-Reaction equations for the electron n<SUB>e</SUB>(,) and neutral n<SUB>n</SUB>(,) densities. Then, we focus on the secondary electron behavior and follow the evolution of their energy. In the light of previous results, we develop a time dependent global model for the ionization region. We solve self-consistently the rate equations for background gas and metal species. The secondary electrons are responsible for the main inelastic collision processes and are therefore treated in detail, kinetically....