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Naji, M. |
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Motta, Antonella |
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Aletan, Dirar |
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Mohamed, Tarek |
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Ertürk, Emre |
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Taccardi, Nicola |
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Kononenko, Denys |
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Petrov, R. H. | Madrid |
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Alshaaer, Mazen | Brussels |
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Bih, L. |
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Casati, R. |
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Muller, Hermance |
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Kočí, Jan | Prague |
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Šuljagić, Marija |
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Kalteremidou, Kalliopi-Artemi | Brussels |
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Azam, Siraj |
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Ospanova, Alyiya |
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Blanpain, Bart |
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Ali, M. A. |
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Popa, V. |
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Rančić, M. |
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Ollier, Nadège |
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Azevedo, Nuno Monteiro |
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Landes, Michael |
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Rignanese, Gian-Marco |
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Schneider, A.
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Topics
Publications (10/10 displayed)
- 2019Atom probe tomography of carbides in Fe‐Cr‐(W)‐C steelscitations
- 2017Performance comparison of small-pixel CdZnTe radiation detectors with gold contacts formed by sputter and electroless depositioncitations
- 2014Biopolymer foams - relationship between material characteristics and foaming behavior of cellulose based foamscitations
- 2013Extended study on short pulse laser ablation of dielectric layers with UV and VIS laser wavelength and pulse durations from fs to ns
- 2013A multi-technique characterization of electroless gold contacts on single crystal CdZnTe radiation detectorscitations
- 2010Low-temperature growth of silicon nanotubes and nanowires on amorphous substrates
- 2005Thermomechanical treatment of a Fe <inf>3</inf>Al alloy
- 2005SU-8 micro-biosensor based on Mach-Zehnder interferometer
- 2004Effect of the degree of order and the deformation microstructure on the kinetics of recrystallisation in a Fe<inf>3</inf>Al Ordered Alloy
- 2002Comparison of PMMA and SU-8 resist moulds for embossing of PZT to produce high-aspect-ratio microstructures using LIGA processcitations
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article
SU-8 micro-biosensor based on Mach-Zehnder interferometer
Abstract
In this paper design, simulations and preliminary experimental results for an optical biosensor, using a Mach-Zehnder interferometer as basic configuration, are presented. This type of sensor offered a lot of advantages such as compactness, real time analysis, low cost and high sensitivity and the possibility of integration of electronic detection components on the same chip. The integrated optical structure is sensitive to refractive index change induced due to the interaction of the evanescent field with an immobilised biological sample placed on one of the two arms of the interferometer (the sensitive one). A window is open in the upper cladding of the waveguide. Changing the bio specimen produces a variation of the refractive index of the cladding layer, which can be observed through the phase shift difference between the light of the two interferometer arms.<br></br><br></br>SU-8 polymer was tested as the core of the optical waveguides, an epoxy-based negative photoresist material, which presented very good transmission properties providing low propagation losses and SiO<sub>2</sub> and PMMA positive photoresist were utilised as lower, respective upper claddings. The Optiwave FDTD software was used for the simulation of the propagation of the electromagnetic field at λ=630 nm and for the optimisation of the Mach Zehnder interferometer parameters.