• Mele, David

Abstract

Outstanding electrical and mechanical properties of graphene make this two-dimensional carbon-based material, one of the leading microelectronics materials. The aim of this thesis is to demonstrate the new possibilities offered by graphene in the field of high-speed and low-noise transistors. RF transistors have been produced on samples obtained by graphitization of SiC substrates. This was possible through the ANR program MIGRAQUEL in partnership with the Laboratory of Photonics and Nanostructures (LPN), the Pierre Aigrain Laboratory (LPA) of ENS and the Institute of Fundamental Electronics (IEF). Graphene samples used in this thesis were synthesized in LPN. The development and optimization of the different technological steps process took place in clean-rooms. Material properties such as mobility, sheet resistance and some technological parameters such as contact resistance are made using specific samples. Then, each GFET and GNRFET (Graphene Nano-Ribbons FET) transistor were analyzed both in static and high-frequency regime. Finally, the best RF measurement in terms of intrinsisc current gain cut-off frequency and maximum oscillation frequency are respectively fr_intr=50GHz and fmax=29GHz; for a gate length of Lg=75nm at Vds=300mV.

Topics

• impedance spectroscopy
• Carbon
• mobility
• two-dimensional
• field-effect transistor method