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Jahanbakhsh, Amir
Heriot-Watt University
in Cooperation with on an Cooperation-Score of 37%
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document
Fabrication of three-dimensional micro-structures in glass by picosecond laser micro-machining and welding
Abstract
This paper describes a relatively inexpensive laser-based process for the fabrication of en-closed three-dimensional micro-structures in borosilicate glass substrates. The micro-structures will be used as customized ‘models’ of subsurface systems for the investigation and the validation of simulations of gas/liquid flow and reactive transport processes occurring in porous media at the pore scale level. The fabrication process of these microfluidic devices us-es the same picosecond laser for the generation of micro-structures on glass and for sealing the structures with another glass plate. The laser processing parameters used for micro-machining and welding of glass substrates are described, and the challenges associated with the overall manufacturing process discussed.