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Berg, Rolf W.
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Publications (9/9 displayed)
- 2022Pressurized solid phosphate electrolyzer for medium temperature water splittingcitations
- 2020CsH 2 PO 4 as Electrolyte for the Formation of CH 4 by Electrochemical Reduction of CO 2citations
- 2020CsH2PO4 as Electrolyte for the Formation of CH4 by Electrochemical Reduction of CO2citations
- 2012Tailoring Properties of Biocompatible PEG-DMA Hydrogels with UV Lightcitations
- 2011NdHO, a novel oxyhydridecitations
- 2008Ge nanoclusters in PECVD-deposited glass caused only by heat treatmentcitations
- 2007Ge nanoclusters in PECVD-deposited glass after heat treating and electron irradiationcitations
- 2004GE NANOCLUSTERS IN PLANAR GLASS WAVEGUIDES DEPOSITED BY PECVD
- 2002Raman mapping in the elucidation of solid salt eutectic and near eutectic structures
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document
GE NANOCLUSTERS IN PLANAR GLASS WAVEGUIDES DEPOSITED BY PECVD
Abstract
Germanium (Ge) has been widely used as the dopant in the core layer of planar glass waveguides to increase the refractive index because it gives a small propagation loss. Plasma enhanced chemical vapour deposition (PECVD) and flame hydrolysis deposition (FHD) are two main material deposition methods for waveguide components. For the first time to our best knowledge, this paper reports the formation of Ge nanoclusters in glass thin films deposited by using PECVD. Ge nanoclusters in glass have been demonstrated to have great potential for application to the nonlinear waveguide components. In this work we study the size and distribution of the nanoclusters by transmission electron microscopy (TEM) and Raman spectroscopy. The formation of the clusters is investigated by varying the Ge concentration in the glass and changing the annealing conditions such as temperature, atmosphere and time.The combined effect of a strong nonlinear glass material and a material platform that is well known from standard planar lightwave components makes this Ge nanoclusters material very promising for optical nonlinear waveguide components that are readily fabricated by using the same processing as standard waveguide components.