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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Wilkinson, James
University of Southampton
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (34/34 displayed)
- 2022Study of prediction intervals in machine learning assisted mid-infrared spectroscopy for the diagnosis of neonatal respiratory distress syndrome
- 2022Prediction of neonatal respiratory distress biomarker concentration by application of machine learning to mid-infrared spectracitations
- 2021High-bandwidth InGaAs photodetectors heterogeneously integrated on silicon waveguides using optofluidic assemblycitations
- 2021The Effect of Haematocrit on Measurement of the Mid-Infrared Refractive Index of Plasma in Whole Bloodcitations
- 2019Mid-IR thermo-optic on-chip spectrometer on a III-V semiconductor platform
- 2018Tantalum pentoxide waveguides and microresonators for VECSEL based frequency combscitations
- 2018Chalcogenide glass waveguides with paper-based fluidics for mid-infrared absorption spectroscopycitations
- 2017Optical quality ZnSe films and low loss waveguides on Si substrates for mid-infrared applicationscitations
- 2015Wavelength division demultiplexer and integrated III-V semiconductor Lasers on a silicon photonics platform with microbubble manipulation
- 2014High-contrast, GeTe4 waveguides for mid-infrared biomedical sensing applicationscitations
- 2012Structural characteristics and optical properties of plasma assisted reactive magnetron sputtered dielectric thin films for planar waveguiding applicationscitations
- 2012Kinoform microlenses for focusing into microfluidic channelscitations
- 2011Integrated Nd-doped borosilicate glass microsphere lasercitations
- 2011Chalcogenide microsphere fabricated from fibre taper-drawn using resistive heating
- 2011Lead silicate glass microsphere resonators with absorption-limited Qcitations
- 2010Simultaneous poling and planar waveguide fabrication in glasses
- 2010Position-dependent coupling between a channel waveguide and a distorted microsphere resonatorcitations
- 2010Structural and optical properties of yttrium oxide thin films for planar waveguiding applicationscitations
- 2010Chalcogenide glass microsphere lasercitations
- 2009Chalcogenide glass microspheres and their applications
- 2009Optical fiber nanowires and microwires: fabrication and applicationscitations
- 2007Chalcogenide glass microspheres: their production characterization and potentialcitations
- 2006Whispering gallery modes excitation in borosilicate glass microspheres by K+ ion-exchanged channel waveguide couplercitations
- 2006Control of coupling between waveguides and microsphere resonators
- 2005Strong refractive index changes induced in Ag ion exchanged Er doped phosphate glass using 248 nm excimer laser radiation
- 2004Strong refractive index changes induced in Ag+ ion-exchanged Er-doped phosphate glass using 248nm excimer laser radiation
- 2004Long refractive index changes induced in Ag+ ion-exchanged Er-doped phosphate glass using 248nm excimer laser radiation
- 2004Photosensitivity of ion-exchanged Er-doped phosphate glass using 248nm excimer laser radiationcitations
- 2003Sub-micron period grating structures in Ta2O5 thin oxide films patterned using UV laser post-exposure chemically assisted selective etching
- 2003New deep glass etching technology
- 2002Planar waveguides in multicomponent glasses fabricated by field-driven differential drift of cationscitations
- 2001Gratings in indium oxide film overlayers on ion-exchanged waveguides by excimer laser micromachiningcitations
- 2001Dynamic AC surface discharge characteristics of PMMA and LDPEcitations
- 2000Relief gratings on Er/Yb-doped borosilicate glasses and waveguides by excimer laser ablationcitations
Places of action
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document
Sub-micron period grating structures in Ta2O5 thin oxide films patterned using UV laser post-exposure chemically assisted selective etching
Abstract
Thin polycrystalline films of Ta<sub>2</sub>O<sub>5</sub> having high chemical resistance and large dielectric permittivity may be deposited by sputtering and have many applications in microelectronics and optoelectronics. A high-resolution and low-damage method for patterning relief structures in thin Ta<sub>2</sub>O<sub>5</sub> films by chemically assisted UV laser selective etching is presented. The method is based in the initial exposure of the Ta<sub>2</sub>O<sub>5</sub> films to pulsed UV radiation (quadrupled Nd:YAG laser at 266nm) at fluences below the ablation threshold, for the creation of volume damage in the exposed areas. Subsequent immersion of the exposed sample in a KOH solution results in selective etching of the UV-exposed areas, developing relief structures of high quality. Interferometric exposure was used for the patterning of such gratings with periods shorter than 500nm in films of thickness between 100nm and 500nm. The behaviour of the patterning process is studied using diffraction efficiency measurements, AFM and SEM scans. Diffraction efficiency increases by a factor of 66, compared to the undeveloped structure, were obtained for gratings exposed with 1000 pulses of 30mJ/cm<sup>2</sup> energy density, which were developed in a KOH solution of 50% weight concentration at a temperature of 55°C for 165mins. The etching method presented is being applied to the fabrication of optical waveguide gratings for telecommunication applications. Potential development of 2-D photonic crystal structures using this process is under investigation.