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Greisen, Christoffer
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article
Simulated SAM A-scans on multilayer MEMS components
Abstract
A spreadsheet program for simulation of Scanning Acoustic Microscopy (SAM) A-scans on multilayer structures has been developed. Using this program, structure variations in samples can be analysed better. Further samples can be prepared to get optimal signal for enhanced failure and materials analysis. Input values for the sample materials are acoustic impedance, speed of sound, and thickness. The simulation is based on calculations of reflection, transmission coefficients, and number N of waves received by the transducer at the same time by reflection at the same interfaces in different order. The calculation of N, the program interface, and simulated A-scans on MEMS test structures for a pressure sensor are presented. (C) 2002 Elsevier Science Ltd. All rights reserved.