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Naji, M. |
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Motta, Antonella |
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Aletan, Dirar |
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Mohamed, Tarek |
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Ertürk, Emre |
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Taccardi, Nicola |
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Kononenko, Denys |
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Petrov, R. H. | Madrid |
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Alshaaer, Mazen | Brussels |
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Bih, L. |
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Casati, R. |
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Muller, Hermance |
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Kočí, Jan | Prague |
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Šuljagić, Marija |
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Kalteremidou, Kalliopi-Artemi | Brussels |
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Azam, Siraj |
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Ospanova, Alyiya |
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Blanpain, Bart |
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Ali, M. A. |
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Popa, V. |
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Rančić, M. |
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Ollier, Nadège |
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Azevedo, Nuno Monteiro |
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Landes, Michael |
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Rignanese, Gian-Marco |
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Chiffre, Leonardo De
Technical University of Denmark
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (39/39 displayed)
- 2020Use of Miniature Step Gauges to Assess the Performance of 3D Optical Scanners and to Evaluate the Accuracy of a Novel Additive Manufacture Processcitations
- 2020Deterministic polishing of micro geometriescitations
- 2020Effect of polymer relaxation in automated micro polishingcitations
- 2019Roughness Investigation of SLM Manufactured Conformal Cooling Channels Using X-ray Computed Tomography
- 2018Post moulding thermal characterization of polymer components
- 2018A simple model linking surface roughness with friction coefficient and manufacturing cost
- 2017Monitoring of the thermal deformations on polymer parts using a vision system
- 2016The influence of humidity on accuracy length measurement on polymer parts
- 2016Environmentally clean micromilling of electron beam melted Ti6Al4Vcitations
- 2016Length determination on industrial polymer parts from measurement performed under transient temperature conditions
- 2015Elastic-properties measurement at high temperatures through contact resonance atomic force microscopycitations
- 2015Defining Allowable Physical Property Variations for High Accurate Measurements on Polymer Parts.citations
- 2015Off-line testing of multifunctional surfaces for metal forming applicationscitations
- 2015Dimensional measurements with submicrometer uncertainty in production environment
- 2014Uncertainty of pin height measurement for the determination of wear in pin-on-plate testcitations
- 2014Reproducibility of a reaming testcitations
- 2014Inter laboratory comparison on Industrial Computed Tomography
- 2013Forming of shape memory composite structurescitations
- 2013Inter laboratory comparison on Industrial Computed Tomography
- 2013Inter laboratory comparison on Industrial Computed Tomography
- 2012Hole quality and burr reduction in drilling aluminium sheetscitations
- 2012Reproducibility of a reaming test
- 2012Inter laboratory comparison on Industrial Computed Tomography
- 2011Hole quality and burr reduction in drilling aluminium sheets
- 2011Reproducibility of surface roughness in reaming
- 2009Investigation on hole manufacture in 42CrMo4 steel using 3-flute carbide drills and 6-flute cermet reamers
- 2009Development of Focused Ion Beam technique for high speed steel 3D-SEM artefact fabrication
- 2008Investigation on Capability of Reaming Process using Minimal Quantity Lubrication
- 2008Effectiveness and resolution of tests for evaluating the performance of cutting fluids in machining aerospace alloyscitations
- 2005Investigation on the traceability of three dimensional scanning electron microscope measurements based on the stereo-pair technique
- 2005Micromilling of hardened tool steel for mould making applications
- 2004Performance evaluation of vegetable-based oils in drilling austenitic stainless steelcitations
- 2004Effect of Cutting Parameters on Microhardness in 2 mm Slot Milling Hardened Tool Steel
- 2002Investigations of Cutting Fluid Performance Using Different Machining Operations
- 2001An Investigation of Reaming Test Parameters Used for Cutting Fluid Evaluations
- 2001Evaluation of Cutting Fluids in Multiple Reaming of Stainless Steel
- 2001Correlation of cutting fluid performance in different machining operations
- 2000Tribology in Metal Cutting
- 2000Testing of Vegetable-Based dutting Fluid by Hole Making Operation
Places of action
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article
Investigation on the traceability of three dimensional scanning electron microscope measurements based on the stereo-pair technique
Abstract
An investigation was carried out concerning the traceability of dimensional measurements performed with the scanning electron microscope (SEM) using reconstruction of surface topography through stereo-photogrammetry. A theoretical description of the effects that the main instrumental variables and measurement parameters have on the reconstruction accuracy of any point on the surface of the object being imaged was undertaken. This description was based on the model function introduced by Piazzesi adapted for eucentrically tilted stereo-pairs. An analysis of the sensitivity coefficients for the vertical elevation model has identified the most important instrumental variables and measurement parameters to be the tilt angle and the magnification calibration. An equation describing the theoretically determined uncertainty of the vertical elevation was produced.An experimental investigation was carried out involving:(i) magnification calibration using a steel scale with 50 ìm pitch at low magnifications, and a 2D calibration grating with 2.120 ìm pitch at high magnifications;(ii) tilt angle calibration by laser interferometry;(iii) vertical elevation calibration using gauge-block steps;(iv) calibration in the vertical plane using two ISO 5436 type C roughness standards.Results from magnification calibration and tilt angle measurement were used for calculating the theoretical uncertainty on the vertical elevation. Experimental deviations measured on gauge-block steps showed slightly bigger values than those calculated from the theoretical model. Lateral measurement on the reconstructed three-dimensional topography of the type C roughness standards showed good agreement with the nominal profile wavelength values.An investigation was carried out concerning the traceability of dimensional measurements performed with the scanning electron microscope (SEM) using reconstruction of surface topography through stereo-photogrammetry. A theoretical description of the effects that the main instrumental variables and measurement parameters have on the reconstruction accuracy of any point on the surface of the object being imaged was undertaken. This description was based on the model function introduced by Piazzesi adapted for eucentrically tilted stereo-pairs. An analysis of the sensitivity coefficients for the vertical elevation model has identified the most important instrumental variables and measurement parameters to be the tilt angle and the magnification calibration. An equation describing the theoretically determined uncertainty of the vertical elevation was produced.An experimental investigation was carried out involving:(i) magnification calibration using a steel scale with 50 ìm pitch at low magnifications, and a 2D calibration grating with 2.120 ìm pitch at high magnifications;(ii) tilt angle calibration by laser interferometry;(iii) vertical elevation calibration using gauge-block steps;(iv) calibration in the vertical plane using two ISO 5436 type C roughness standards.Results from magnification calibration and tilt angle measurement were used for calculating the theoretical uncertainty on the vertical elevation. Experimental deviations measured on gauge-block steps showed slightly bigger values than those calculated from the theoretical model. Lateral measurement on the reconstructed three-dimensional topography of the type C roughness standards showed good agreement with the nominal profile wavelength values.An investigation was carried out concerning the traceability of dimensional measurements performed with the scanning electron microscope (SEM) using reconstruction of surface topography through stereo-photogrammetry. A theoretical description of the effects that the main instrumental variables and measurement parameters have on the reconstruction accuracy of any point on the surface of the object being imaged was undertaken. This description was based on the model function introduced by Piazzesi adapted for eucentrically tilted stereo-pairs. An analysis of the sensitivity coefficients for the vertical elevation model has identified the most important instrumental variables and measurement parameters to be the tilt angle and the magnification calibration. An equation describing the theoretically determined uncertainty of the vertical elevation was produced.An experimental investigation was carried out involving:(i) magnification calibration using a steel scale with 50 ìm pitch at low magnifications, and a 2D calibration grating with 2.120 ìm pitch at high magnifications;(ii) tilt angle calibration by laser interferometry;(iii) vertical elevation calibration using gauge-block steps;(iv) calibration in the vertical plane using two ISO 5436 type C roughness standards.Results from magnification calibration and tilt angle measurement were used for calculating the theoretical uncertainty on the vertical elevation. Experimental deviations measured on gauge-block steps sh...