• Marinello, F.
• Carli, Lorenzo
• Macdonald, A. Nicole
• Chiffre, Leonardo De
• Carmignato, S.
• Horsewell, Andy

Abstract

The work describes preliminary manufacture by grinding, followed by machining on a Focused Ion Beam (FIB), of a high speed steel step artefact for 3D-SEM calibration. The FIB is coupled with a SEM in the so called dual beam instrument. The milling capabilities of FIB were checked from a qualitative point of view, using the dual beam SEM imaging, and quantitatively using a reference stylus instrument, to establish traceability. A triangular section having a depth of about 10 μm was machined, where the 50 μm curvature radius due to grinding was reduced to about 2 μm by FIB milling as it was estimated using the dual beam SEM.

Topics

• impedance spectroscopy
• scanning electron microscopy
• grinding
• milling
• focused ion beam
• high speed steel