| People | Locations | Statistics |
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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Bartasyte, Ausrine
STMicroelectronics (United Kingdom)
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (29/29 displayed)
- 2024Integration of epitaxial LiNbO3 thin films with silicon technologycitations
- 2023Dispersion of surface elastic waves on Z-LiNbO3 films on Z-sapphirecitations
- 2023Material strategies to enhance the performance of piezoelectric energy harvesters based on lead-free materialscitations
- 2023Material strategies to enhance the performance of piezoelectric energy harvesters based on lead-free materialscitations
- 2023Material strategies to enhance the performance of piezoelectric energy harvesters based on lead-free materialscitations
- 2023Correlated disorder by defects clusters in LiNbO3 single crystals after crys-tal ion-slicingcitations
- 2022A smart battery free system for wireless condition monitoring using piezoelectric energy harvestercitations
- 2022A low-cost alternative lead-free piezoelectric LiNbO3 films for micro-energy sources
- 2022Dy-Doped BiFeO3 thin films: piezoelectric and bandgap tuning
- 2022Self-Poled Heteroepitaxial Bi_(1-x) Dy_x FeO_3 Films with Promising Pyroelectric Propertiescitations
- 2022Self‐Poled Heteroepitaxial Bi(1−x)DyxFeO3 Films with Promising Pyroelectric Propertiescitations
- 2021LiNbO3 films – A low-cost alternative lead-free piezoelectric material for vibrational energy harvesterscitations
- 2021A Self-Powered and Battery-Free Vibrational Energy to Time Converter for Wireless Vibration Monitoringcitations
- 2021A Self-Powered and Battery-Free Vibrational Energy to Time Converter for Wireless Vibration Monitoringcitations
- 2021Highly coupled and low frequency vibrational energy harvester using lithium niobate on siliconcitations
- 2020New Approach of Interdigitated Transducers Engineering for High-Temperature Surface Acoustic Wave Sensors
- 2020Piezoelectric Ba and Ti co-doped BiFeO<sub>3</sub> textured films: selective growth of solid solutions or nanocompositescitations
- 2018Towards stoichiometric LiNbO3 epitaxial thin films grown by DLI-MOCVD
- 2018Low-loss rutile TiO2 films for nanophotonics applications
- 2018Piezoelectric and pyroelectric energyharvesting from lithium niobate films
- 2018Piezoelectric and pyroelectric energy harvesting from lithium niobate films
- 2016LiNbO3-an alternative lead-free material for vibrational energy harvesters
- 2016Influence of plasma treatments and SnO2 alloying on the conductive properties of epitaxial Ga2O3 films deposited on C-sapphire by chemical vapor deposition
- 2016Epitaxy, optical and acoustical properties of X-, Y-, and Z-axis oriented LiNbO3 thin films on sapphire substrates
- 2016Residual stresses in X-, Y-, and Z-axis oriented LiNbO3 thin films on sapphire substrates
- 2015Can LiNbO3 be an alternative for PZT in vibrational energy harvesters?
- 2014Effect of microwave remote plasma and radiofrequency plasma on the photoluminescence of (0001) epitaxial ZnO filmscitations
- 2013Ferroelectric nanodomains in epitaxial PbTiO3 films grown on SmScO3 and TbScO3 substratescitations
- 2006Ferroelectric PbTiO3 films grown by pulsed liquid injection metalorganic chemical vapour deposition
Places of action
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conferencepaper
Towards stoichiometric LiNbO3 epitaxial thin films grown by DLI-MOCVD
Abstract
Lithium Niobate (LiNbO3 or LN) is a ferroelectric compound that presents remarkable electro-optical, acoustical, pyroelectrical and ferroelectrical properties. As such, it was extensively studied and for a large variety of potential applications such as waveguides1, high frequency filters (RF)2 and ferroelectric memory (FRAM). However, this material in the form of thin films of controlled stoichiometry is still not available in industry. Direct liquid injection metalorganic chemical vapor deposition technique (DLI-MOCVD) was used to grow epitaxial LiNbO3 thin films on various substrates using tetramethylheptanedionate precursors, Li(thd) and Nb(thd)4. Epitaxial relationships are presented, and structural properties of the deposited films are investigated using X-ray diffraction (XRD) and scanning electron microscope (SEM) techniques. As lithium non-stoichiometry in LiNbO3 films is a critical parameter defining high acoustical/optical performance, lithium incorporation in the films was studied in details by varying deposition conditions. Li concentration in the films was estimated by means of Raman spectroscopy.