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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Rignanese, Gian-Marco |
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Mauczok, R.
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Publications (3/3 displayed)
- 2010BaxSr1-xTi1.02O3 metal-insulator-metal capacitors on planarized alumina substratescitations
- 2008The trade-off between tuning ratio and quality factor of BaxSr1-xTiO3 MIM capacitors on alumina substrates
- 2007Separation of intrinsic dielectric and resistive electrode losses in ferroelectric capacitors at radio frequencies
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document
Separation of intrinsic dielectric and resistive electrode losses in ferroelectric capacitors at radio frequencies
Abstract
To analyze the intrinsic dielectric performance of planar high-density capacitors at radio frequencies (RF), the dielectric losses need to be distinguished from the resistive electrode losses. The resistive losses of the electrodes at RF are de-embedded employing a linear regression procedure with partial compensation for distributed effects. We use tunable ferroelectric capacitors with a barium strontium titanate (BST) dielectric with an inner diameter d ≥ 8 μm on a silicon substrate. The de-embedding of the electrode losses has been successfully performed utilizing 1-Port RF measurement data from of an Advantest R3767CG vector network analyzer (VNA) in the frequency range of 10 MHz – 8 GHz.