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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Huth, Michael
European Commission
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (19/19 displayed)
- 2024Nanoscale, surface-confined phase separation by electron beam induced oxidationcitations
- 2024Gas-Phase Synthesis of Iron Silicide Nanostructures Using a Single-Source Precursorcitations
- 2023Pillar Growth by Focused Electron Beam-Induced Deposition Using a Bimetallic Precursor as Model Systemcitations
- 2022Vanadium and Manganese Carbonyls as Precursors in Electron-Induced and Thermal Deposition Processes
- 2022Direct-Write 3D Nanoprinting of High-Resolution Magnetic Force Microscopy Nanoprobes
- 2022Precursors for Direct-Write Nanofabrication with Electrons
- 2022Highly-packed proximity-coupled DC Josephson junction arrays by a direct-write approachcitations
- 2022Focused Ion Beam vs Focused Electron Beam Deposition of Cobalt Silicide Nanostructures Using Single-Source Precursorscitations
- 2021AC conductivity and correlation effects in nano-granular Pt/Ccitations
- 2021Engineered Magnetization and Exchange Stiffness in Direct-Write Co-Fe Nanoelementscitations
- 2018Preparation of polymer/clay hybrid encapsulation for barrier applications controlled by Hansen Solubility Parameters
- 2014Charge transfer tuning by chemical substitution and uniaxial pressure in the organic complex tetramethoxypyrene–tetracyanoquinodimethanecitations
- 2014Magnetization reversal assisted by half antivortex states in nanostructured circular cobalt diskscitations
- 2013Variable tunneling barriers in FEBID based PtC metal-matrix nanocomposites as a transducing element for humidity sensingcitations
- 2012Spontaneous dissociation of Co 2 (CO) 8 and autocatalytic growth of Co on SiO 2: a combined experimental and theoretical investigationcitations
- 2012Focused electron beam induced deposition: a perspectivecitations
- 2012Electrical transport and pinning properties of Nb thin films patterned with focused ion beam-milled washboard nanostructurescitations
- 2012Spontaneous dissociation of Co₂(CO)₈ and autocatalytic growth of Co on SiO₂: A combined experimental and theoretical investigationcitations
- 2010A tunable strain sensor using nanogranular metalscitations
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document
Precursors for Direct-Write Nanofabrication with Electrons
Abstract
Focused electron beam deposition (FEBID) allows the spatially controlled formation of nanoparticles, thin films,nanowires and free-standing complex nanoarchitectures on a wide range of substrate materials. Moreover, themethod enables a growth on structured surfaces and the formation of predefined arrays by this maskless direct-writeapproach. However, the purity of the as-grown material is typically limited. According to the knowledge gained byconsidering surface science studies, several different reaction paths could be assigned according to the compositiongained in FEBID experiments as summarized in Fig. 1. Therefore, the FEBID method requires precursor developmentto provide chemical impetus driving its broader applicability. This contribution will shortly summarize the state-of theart of precursors used, which has been described in a recent review [1]. Moreover, suggestions of necessarylimitations or suggestions will be presented. The knowledge gained is applied to the synthesis procedures for metalsilicide and alloy formation. Specific examples of precursors will be discussed and approaches for targeted binarycompounds will be present