| People | Locations | Statistics |
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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Sagot, Matthieu
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (4/4 displayed)
- 2024Functionality integration in stereolithography 3D printed microfluidics using a “print-pause-print” strategy†citations
- 2024Functionality integration in stereolithography 3D printed microfluidics using a “print-pause-print” strategycitations
- 20233D Integration of a µSieve for Particle Filtration Combined with real-time in-situ Analysis within Complex Media
- 2022Micro-perforated membrane for label-free cell capture and integrated electrical detection operating in whole blood
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document
3D Integration of a µSieve for Particle Filtration Combined with real-time in-situ Analysis within Complex Media
Abstract
International audience ; In the context of liquid biopsy, the current main challenge is the extraction of the biological information through the capture of tumoral biomarkers from complex body fluids. These biomarkers, and more specifically Circulating Tumor Cells (CTCs), are usually present at very low concentrations compared to billions of peripheral blood cells. We aim to address this issue though the conception and fabrication of an integrated CTC capture, detection, and analysis device. In the last MNE edition, we presented the fabrication of a microperforated membrane device for cell capture with a label-free detection method using impedance spectroscopy. Now, we present a new clean room fabrication process for the device coupling cell capture with electrical detection and in-situ analysis, together with the development of a 3D printed integration chip (ICHIP) for live optical imaging. Altogether, the combination of these technological developments allows for live electrical and optical characterization of collected cells on a microperforated membrane.The fabrication principle of the microdevice is based on a five-layer process including thermal oxidation, UV photolithography, vapor phase deposition, electrolytical growth and reactive ion etching. The microdevice finally exhibits three key parts: the filtering micro-perforated membrane, the gold micro-electrodes, and the silicon supporting structure. The filtering membrane is made of a bilayer of SiO2 and Si3N4 respectively obtained through thermal oxidation of silicon and Low-Pressure Chemical Vapor Deposition (LPCVD). This membrane is perforated with micro-holes using RIE (CHF3 and O2), thus forming the thin filtering membrane. A metal layer of chrome and gold is deposited on the membrane using vacuum evaporation. This metal layer is used first as a seed layer for electrochemical thickening of the contact pads, it is then etched using RIE to pattern the micro-electrodes. Finally, a deep reactive ion etching of the silicon wafer forms the fluidic channel ...