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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Huth, Michael
European Commission
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (19/19 displayed)
- 2024Nanoscale, surface-confined phase separation by electron beam induced oxidationcitations
- 2024Gas-Phase Synthesis of Iron Silicide Nanostructures Using a Single-Source Precursorcitations
- 2023Pillar Growth by Focused Electron Beam-Induced Deposition Using a Bimetallic Precursor as Model Systemcitations
- 2022Vanadium and Manganese Carbonyls as Precursors in Electron-Induced and Thermal Deposition Processes
- 2022Direct-Write 3D Nanoprinting of High-Resolution Magnetic Force Microscopy Nanoprobes
- 2022Precursors for Direct-Write Nanofabrication with Electrons
- 2022Highly-packed proximity-coupled DC Josephson junction arrays by a direct-write approachcitations
- 2022Focused Ion Beam vs Focused Electron Beam Deposition of Cobalt Silicide Nanostructures Using Single-Source Precursorscitations
- 2021AC conductivity and correlation effects in nano-granular Pt/Ccitations
- 2021Engineered Magnetization and Exchange Stiffness in Direct-Write Co-Fe Nanoelementscitations
- 2018Preparation of polymer/clay hybrid encapsulation for barrier applications controlled by Hansen Solubility Parameters
- 2014Charge transfer tuning by chemical substitution and uniaxial pressure in the organic complex tetramethoxypyrene–tetracyanoquinodimethanecitations
- 2014Magnetization reversal assisted by half antivortex states in nanostructured circular cobalt diskscitations
- 2013Variable tunneling barriers in FEBID based PtC metal-matrix nanocomposites as a transducing element for humidity sensingcitations
- 2012Spontaneous dissociation of Co 2 (CO) 8 and autocatalytic growth of Co on SiO 2: a combined experimental and theoretical investigationcitations
- 2012Focused electron beam induced deposition: a perspectivecitations
- 2012Electrical transport and pinning properties of Nb thin films patterned with focused ion beam-milled washboard nanostructurescitations
- 2012Spontaneous dissociation of Co₂(CO)₈ and autocatalytic growth of Co on SiO₂: A combined experimental and theoretical investigationcitations
- 2010A tunable strain sensor using nanogranular metalscitations
Places of action
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document
Direct-Write 3D Nanoprinting of High-Resolution Magnetic Force Microscopy Nanoprobes
Abstract
Magnetic devices play an important role in modern electronic, sensing or data storage applications. Toexploit their full potential, high-resolution Magnetic Force Microscopy (MFM) is established asstandard characterization technology as part of the research and development loop. Due to theongoing trend towards smaller and smaller active feature sizes, the demands on high-resolution MFMtips are also increasing. Based on that motivation, we here aim on the fabrication of MFM nanoprobeswith functional apex radii in the sub-10 nm regime. Traditional products mostly base on additionalmagnetic coatings, which increases the apex radii and therefore limits the lateral resolution duringAtomic Force Microscopy (AFM) based MFM measurements. Another disadvantage of a magneticcoating is local delamination, which can occur due to the mechanical stress during scanning and leadto a change (or even complete loss) in magnetic sensitivity. Therefore, it was the goal to fabricate fullymagnetic nanoscale tips, that do not require additional coating. Focused Electron Beam InducedDeposition (FEBID) was used for additive, direct-write 3D-nanoprinting of such magnetic tips on prefinishedself-sensing AFM cantilevers.[1],[2] For that, a novel HCo3Fe(CO)12 precursor was used, which isone of the few precursors, providing metal contents above 90 at.% after initial FEBID fabrication.[3] Toexplore the possibilities, we comprehensively studied the parameter space and their implications onmorphology, structure and chemistry in detail by using SEM, EDX, and TEM and STEM EELS (Figure 1.a).Next, the tip geometry was further optimized by an advanced, dynamic pattering sequence to fulfil thehigh demands for AFM operation.[4] Additionally, the fabricated tips were subjected to different postprocessingprocedures such as post-irradiation with electrons, thermal treatments and purificationprotocols to explore and identify the most promising fabrication window. The basic performance ofsuch MFM tips is then demonstrated with special focus on lateral resolution, magnetic phase shift andsignal-to-noise ratio. Fully optimized FEBID-MFM tips were then tested on various magnetic samples(magnetic multilayer system (Figure 1.b-e), hard disc drives, magnetic recording tapes) andbenchmarked to commercially available MFM tips (Figure 1.b-c). Finally, the wear resistance of suchMFM nanoprobes was evaluated during a continuous operation scan over a period of 3.7 hours, whichrevealed the high durability of the presented concept (Figure 1.d-e). By that, we demonstrate thesuccessful 3D-nanoprinting of MFM tips on self-sensing cantilevers, which fulfils the high requirementswhen aiming on industrially relevant MFM tips using FEBID-based 3D nanoprinting.