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Sikanen, Tiina
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document
Advances in metallization of organically modified ceramics
Abstract
<p>Organically modified ceramic polymers (ORMOCERs) have recently attracted interest in microfluidic applications thanks to their good biocompatibility and optical transparency. In many applications, metallization is required, but adhesion of metals on polymers and bonding over metal films are major challenges for microfabrication. In this study, we developed case-specific processes for Al, Ag, Au and Pt that enable stable metallization on top of a commercial ORMOCER material, Ormocomp, and also facilitate Ormocomp-Ormocomp bonding and thus fabrication of fully enclosed micro devices with embedded metal elements.</p>