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Naji, M. |
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Motta, Antonella |
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Aletan, Dirar |
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Mohamed, Tarek |
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Ertürk, Emre |
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Taccardi, Nicola |
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Kononenko, Denys |
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Petrov, R. H. | Madrid |
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Alshaaer, Mazen | Brussels |
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Bih, L. |
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Casati, R. |
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Muller, Hermance |
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Kočí, Jan | Prague |
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Šuljagić, Marija |
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Kalteremidou, Kalliopi-Artemi | Brussels |
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Azam, Siraj |
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Ospanova, Alyiya |
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Blanpain, Bart |
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Ali, M. A. |
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Popa, V. |
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Rančić, M. |
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Ollier, Nadège |
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Azevedo, Nuno Monteiro |
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Landes, Michael |
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Rignanese, Gian-Marco |
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Halbwax, Mathieu
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Topics
Publications (19/19 displayed)
- 20193D Patterning of Si by Contact Etching With Nanoporous Metalscitations
- 2019A new method of dielectric characterization using a genetic algorithm and a coplanar waveguide on bilayer films
- 2017Advances in silicon surface texturization by metal assisted chemical etching for photovoltaic applicationscitations
- 2017Advances in silicon surface texturization by metal assisted chemical etching for photovoltaic applicationscitations
- 20173D patterning of silicon by contact etching with anodically biased nanoporous gold electrodescitations
- 2017Microstructuration of Silicon Surfaces Using Nanoporous Gold Electrodes
- 2016Tunable Nanostructuration of Si by MACE with Pt nanoparticles under an applied external bias
- 2016Tunable Nanostructuration of Si by MACE with Pt nanoparticles under an applied external bias
- 2016Tunable Surface Structuration of Silicon by Metal Assisted Chemical Etching with Pt Nanoparticles under Electrochemical Biascitations
- 2016Controlled elaboration of high aspect ratio cone-shape pore arrays in silicon by metal assisted chemical etching
- 2016Controlled elaboration of high aspect ratio cone-shape pore arrays in silicon by metal assisted chemical etching
- 2014Electro-optic and converse-piezoelectric properties of epitaxial GaN grown on silicon by metal-organic chemical vapor depositioncitations
- 2012Antireflective sol-gel TiO2 thin films for single crystal silicon and textured polycrystal siliconcitations
- 2010Measurement of the microwave permittivity of polymer materials for high-speed optical modulator design
- 2010Measurement of the microwave permittivity of polymer materials for high-speed optical modulator design
- 2010Structure optimization of electro-optic polymer waveguides for low half-wave voltage modulatorscitations
- 2007Epitaxial growth of Ge on a thin SiO2 layer by ultrahigh vacuum chemical vapor depositioncitations
- 2004Microstructuration of Silicon Surfaces Using Nanoporous Gold Electrodes
- 2004Deposition and characterisation of Ge layers epitaxial grown on silicon for the fabrication of waveguide photodetector.
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document
Tunable Nanostructuration of Si by MACE with Pt nanoparticles under an applied external bias
Abstract
We present a study on metal assisted chemical etching of p-type c-Si with Pt nanoparticles, performed under controlled polarization of the Si sample in a 3-electrodes electrochemical setup. OCP measurements combined with impedance spectroscopy and cyclic voltammetry allow to give physical insights in the MACE process. In addition, the application of an external polarization during etching results in a straightforward control of the pore morphology, ranging from straight mesopores to cone-shaped macropores as the Si sample is positively biased. The latter morphology leads to a reduction of the surface reflectivity below 5% which compares favorably with state of the art texturization techniques for Si solar cells.