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Naji, M. |
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Motta, Antonella |
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Aletan, Dirar |
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Mohamed, Tarek |
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Ertürk, Emre |
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Taccardi, Nicola |
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Kononenko, Denys |
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Petrov, R. H. | Madrid |
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Alshaaer, Mazen | Brussels |
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Bih, L. |
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Casati, R. |
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Muller, Hermance |
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Kočí, Jan | Prague |
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Šuljagić, Marija |
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Kalteremidou, Kalliopi-Artemi | Brussels |
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Azam, Siraj |
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Ospanova, Alyiya |
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Blanpain, Bart |
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Ali, M. A. |
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Popa, V. |
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Rančić, M. |
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Ollier, Nadège |
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Azevedo, Nuno Monteiro |
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Landes, Michael |
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Rignanese, Gian-Marco |
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Karuthedath, Cyril Baby
VTT Technical Research Centre of Finland
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (8/8 displayed)
- 2023Non-monolithic fabrication of thin-film microelectrode arrays on PMUT transducers as a bimodal neuroscientific investigation toolcitations
- 2023An Ultrasonically Powered System Using an AlN PMUT Receiver for Delivering Instantaneous mW-Range DC Power to Biomedical Implantscitations
- 2023Piezoelectric ultrasonic transducer and system
- 2023Phase-Sensitive Air Flow Measurement Using PMUTscitations
- 2021Characterization of AlScN-based multilayer systems for piezoelectric micromachined ultrasound transducer (pMUT) fabricationcitations
- 2021Characterization of AlScN-Based Multilayer Systems for Piezoelectric Micromachined Ultrasound Transducer (pMUT) Fabricationcitations
- 2020The impact of residual stress on resonating piezoelectric devicescitations
- 2019Design and Fabrication of Aluminum Nitride Piezoelectric Micromachined Ultrasonic Transducers for Air Flow Measurementscitations
Places of action
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patent
Piezoelectric ultrasonic transducer and system
Abstract
There is provided an ultrasonic transducer configured to provide passive temperature compensation for a stable operation over a wide bandwidth. The ultrasonic transducer comprises a cavity for communications of ultrasonic waves and a membrane supported movable between walls of the cavity. The membrane comprises a structural layer on a side of the membrane towards the cavity and a piezoelectric layer attached to the structural layer on an opposite side of the membrane with respect to the cavity. Temperature coefficients of Young's modulus of the structural layer and the piezoelectric layer have opposite signs for passive temperature compensation of operating frequency of the piezoelectric ultrasonic transducer.<br/><br/><b>Patent family as of 10.1.2024</b><br/>EP4240540 A1 20230913 EP20210810649 20211108<br/>FI20206130 A 20220510 FI20200006130 20201109<br/>US2023415198 AA 20231228 US20230035892 20211108<br/>WO22096790 A1 20220512 WO2021FI50755 20211108