| People | Locations | Statistics |
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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Rebrov, Evgeny V.
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (22/22 displayed)
- 2023Process intensification for gram-scale synthesis of N-doped carbon quantum dots immersing a microplasma jet in a gas-liquid reactorcitations
- 2020Non-thermal plasma for process and energy intensification in dry reforming of methanecitations
- 2019Enhanced Droplet Size Control in Liquid-Liquid Emulsions Obtained in a Wire-Guided X-Mixercitations
- 2019Enhanced Droplet Size Control in Liquid-Liquid Emulsions Obtained in a Wire-Guided X-Mixercitations
- 2015Mechanochemical synthesis of TiO2/NiFe2O4 magnetic catalysts for operation under RF fieldcitations
- 2011Structural and magnetic properties of sol-gel Co2xNi0.5-x Zn0.5-xFe2)4 thin filmscitations
- 2010Structural investigations and magnetic properties of sol-gel Ni(0.5)Zn(0.5)Fe2O4 thin films for microwave heatingcitations
- 2010Use of microtechnologies for intensifying industrial processescitations
- 2009Selective hydrogenation of acetylene alcohols over a Pd/TiO2 coating in a capillary microreactor
- 2009Confined palladium colloids in mesoporous frameworks for carbon nanotube growthcitations
- 2009Determination of the Tolman length in the improved Derjaguin-Broekhoff-de Boer theory for capillary condensation of ethanol in mesoporous thin films by ellipsometric porosimetrycitations
- 2009Method for control of the thickness of mesoporous titania films for applications in catalytic microreactors
- 2009Thin catalytic coatings on microreactor walls: a way to make industrial processes more efficient
- 2008Oxidation of organic compounds in a microstructured catalytic reactorcitations
- 2008Microwave-assisted hydrothermal synthesis of zeolite Beta coatings on ALD-modified borosilicate glass for application in microstructured reactorscitations
- 2008Mesoporous silica films as catalyst support for microstructured reactors: preparation and characterizationcitations
- 2008Gold supported on mesoporous titania thin films for application in microstructured reactors in low-temperature water-gas shift reactioncitations
- 2007Method for the in situ preparation of a single layer of zeolite beta crystals on a molybdenum substrate for microreactor applicationscitations
- 2007Film properties and in-situ optical analysis of TiO2 layers synthesized by remote plasma ALD
- 2006Preparation and characterization of bimetallic catalysts supported on mesoporous silica filmscitations
- 2005Optimization of anodic oxidation and Cu-Cr oxide catalyst preparation on structured aluminum plates processed by electro discharge machiningcitations
- 2003Challenging prospects for microstructured reaction architectures. (1). Zeolite coating synthesis and high-throughput experimentation in a microreactor
Places of action
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document
Film properties and in-situ optical analysis of TiO2 layers synthesized by remote plasma ALD
Abstract
TiO2 is a widely studied material due to its optical and photocatalytic properties and its hydrophilic nature after prolonged UV exposure. When synthesized by atomic layer deposition (ALD) the TiO2 can be deposited with ultimate growth control with a high conformality on demanding topologies and even at room temperature when e.g. using a plasma based process. We report on the deposition of TiO2 films using remote plasma ALD with titanium (IV) isopropoxide as precursor and O2 plasma as oxidant. Stochiometric TiO2 films with carbon and hydrogen levels below the detection limit of Rutherford backscattering/elastic recoil detection (<2 at.%) have been deposited within the temperature range of 25°C to 300°C. Depending on the ALD conditions and film thickness amorphous films turn anatase for temperatures higher than 200°C as revealed by X-ray diffraction. It is demonstrated that this change in crystal phase can also be observed by spectroscopic ellipsometry revealing an increase in growth rate per cycle (from typically 0.45 Å/cycle to 0.7 Å/cycle) and change in bandgap (from 3.4 eV to 3.7 eV) when the TiO2 becomes anatase. An accompanying change in surface topology is clearly observed by atomic force microscopy. The hydrophilicity of low temperature TiO2 films is studied by contact angle measurements for adhesion purposes revealing that the amorphous films are super-hydrophilic after UV exposure.