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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Casati, R. |
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| Kočí, Jan | Prague |
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| Azam, Siraj |
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| Ali, M. A. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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Anhøj, Thomas Aarøe
Technical University of Denmark
in Cooperation with on an Cooperation-Score of 37%
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conferencepaper
Pyrolytic 3D Carbon Microelectrodes for Electrochemistry
Abstract
This work presents the fabrication and characterization of multi-layered three-dimensional (3D) pyrolysed carbon microelectrodes for electrochemical applications. For this purpose, an optimized UV photolithography and pyrolysis process with the negative tone photoresist SU-8 has been developed. The fabricated three electrode electrochemical cell is characterized with cyclic voltammetry (CV) using the standard potassium ferri-ferrocyanide redox probe. Carbon materials have several attractive characteristics as microelectrodes for electrochemical applications, such as wide potential window, good electrochemical activity, chemical stability, and ease in surface functionalization [1]. The most common carbon microfabrication techniques (i.e. screen printing) produce two-dimensional (2D) electrodes, which limit the detection sensitivity. Hence several 3D microfabrication techniques have been explored in recent years amongst which the carbon MEMS (C-MEMS) technique is the most promising one. C-MEMS is a simple and cost-effective method for carbon electrode fabrication, where a patterned polymer template treated at high temperature (~900°C) in inert atmosphere (N2 or Ar) is transformed into pyrolysed carbon [2]. This process enables fabrication of 2D and 3D electrodes with possibility for tailoring ad-hoc designs and unique sensitivities for specific applications. Due to this, pyrolysed carbon is becoming increasingly attractive for numerous applications, such as novel sensors and scaffolds for cell analysis [3]. However fabrication of a conducting 3D microstructure with feature sizes in the micron-range still remains a challenge. In this work an optimized UV photolithography and pyrolysis process for SU-8 based on highly controlled exposure dose and modified baking time is presented to obtain multi-layered 3D carbon microelectrodes for electrochemistry (figure 1.A). SU-8 2005 (5.6µm) is spin coated on a Si/SiO2 wafer, soft baked (SB) at 50C for 30min followed by UV exposure (E1 – 210mJ cm-2) and post exposure bake ...