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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Hien, Tong Duy
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Publications (4/4 displayed)
- 2002Fabrication and characterization of MEMS based wafer-scale palladium-silver alloy membranes for hydrogen separation and hydrogenation/dehydrogenation reactionscitations
- 2002Micromachined Palladium - Silver Alloy Membranes for Hydrogen Separation
- 2001Platinum patterning by a modified lift-off technique and its application in a silicon load cell
- 2000Characterization of platinum lift off technique
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document
Micromachined Palladium - Silver Alloy Membranes for Hydrogen Separation
Abstract
This paper presents wafer-scale palladium - silver alloy membranes, fabricated with a sequence of wellknown thin film and silicon micromachining techniques. The membranes have been tested in a gas permeation system to determine the hydrogen permeability and hydrogen selectivity. Typical flow rates of 1 mol H2 /m2.s have been measured with a minimal selectivity of 1500 for H2/He. The membranes have high mechanical strength and can withstand pressures up to 4 bars at room temperature. These membranes have the potential to be used for hydrogen purification and other applications such as membrane reactors for hydrogenation/dehydrogenation reactions. The presented fabrication method also allows the development of a module for industrial applications that consists of a stack with a large number of glass/membrane plates.