• Abdurrochman, Andri

Abstract

This work has shown that the lateral resolution etching using near infrared lasers nanoseconds could be reduced by passing the beam through a glass microsphere or a silica fibers with spheroid shape in such a way to generate photonic jets. Etching on silicon size with a glass microsphere can be reduced by a factor of 44 compared to that of a direct etching without photonic jet. Powers reached densities allow even consider burning the glass with this type of laser, despite its very low absorption at these wavelengths. For the first time we have shown the possibility of obtaining photonic jets coming-out of a spheroid-tip of fiber optic. We also have shown the ability to etch silicon at the micron scale using the near infrared nanosecond laser. The possible use of optical fibers is clearly a decisive condition for the realization of a laser capable of etching process real intricate designs and repeatedly.

Topics

• impedance spectroscopy
• glass
• glass
• Silicon
• etching