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Kainlauri, Markku
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document
Membranes and tubules by nanoimprinting and atomic layer deposition
Abstract
The residual layer inherent for nanoimprinting is usuallytaken to be a problem in the process. We exploit theresidual layer in fabrication of the complexfree-standing membranes by growing a layer of Al2O3 orAl2O3/TiO2 lamellae by ALD directly on top of thenanoimprinted polymer film, following by removal of thesacrificial polymer layer.