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article
Anisotropic thermal conductivity of nanocolumnar W thin films
Abstract
We report on experimental investigations of the thermal conductivity in W thin films 350 nm thick sputter-deposited by glancing angle deposition (GLAD). The 3ω method is used to measure the in-plane thermal conductivity kx and ky for films deposited with a deposition angle α of 0° and 80°. For classical films (α = 0°), the thermal conductivity is 71 Wm-1K-1 for both x and y directions, whereas for GLAD films (α = 80°) the in-plane conduction strongly drops with kx = 3.2 Wm-1K-1 and ky = 4.8 Wm-1K-1. The in-plane thermal conductivity anisotropy is determined with a heat conduction favored in the direction perpendicular to the deposition axis (anisotropic ratio of 1.5), which is connected to the anisotropic columnar microstructure. Some correlations with the electrical conductivity are discussed showing a significant deviation from the Wiedemann-Franz law for the in-plane transport properties of GLAD W films.