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| Naji, M. |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Petrov, R. H. | Madrid |
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| Casati, R. |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Vairac, Pascal
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Topics
Publications (8/8 displayed)
- 2022Anisotropic thermal conductivity of nanocolumnar W thin films
- 2022Anisotropic thermal conductivity of nanocolumnar W thin films
- 2020Influence of thickness and sputtering pressure on electrical resistivity and elastic wave propagation in oriented columnar tungsten thin filmscitations
- 2019Electrical resistivity and elastic wave propagation anisotropy in glancing angle deposited tungsten and gold thin films
- 2017Anisotropic propagation imaging of elastic waves in oriented columnar thin filmscitations
- 2013Laser Excited Electronic and Thermal Elastic Vibrations in a Semiconductor Rectangular Platecitations
- 2013Simultaneous measurement of Young's modulus and Poisson's ratio at microscale with multimode scanning microdeformation microscopy and full-field measurements
- 2008Scanning microdeformation microscopy: sensitivity study and application to mechanical characterization of soft materialcitations
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article
Anisotropic thermal conductivity of nanocolumnar W thin films
Abstract
We report on experimental investigations of the thermal conductivity in W thin films 350 nm thick sputter-deposited by glancing angle deposition (GLAD). The 3ω method is used to measure the in-plane thermal conductivity kx and ky for films deposited with a deposition angle α of 0° and 80°. For classical films (α = 0°), the thermal conductivity is 71 Wm-1K-1 for both x and y directions, whereas for GLAD films (α = 80°) the in-plane conduction strongly drops with kx = 3.2 Wm-1K-1 and ky = 4.8 Wm-1K-1. The in-plane thermal conductivity anisotropy is determined with a heat conduction favored in the direction perpendicular to the deposition axis (anisotropic ratio of 1.5), which is connected to the anisotropic columnar microstructure. Some correlations with the electrical conductivity are discussed showing a significant deviation from the Wiedemann-Franz law for the in-plane transport properties of GLAD W films.