• Jaakkola, Antti
• Kiihamäki, Jyrki
• Pensala, Tuomas

Abstract

The invention relates to a microelectromechanical resonators and a method of manufacturing thereof. The resonator comprises at least two resonator elements made from semiconductor material, the resonator elements being arranged laterally with respect to each other as an array, at least one transducer element coupled to said resonator elements and capable of exciting a resonance mode to the resonator elements. According to the invention, said at least one transducer element is a piezoelectric transducer element arranged laterally with respect to the at least two resonator elements between the at least two resonator elements and adapted to excite to the resonator elements as said resonance mode a resonance mode whose resonance frequency is dependent essentially only on the c44 elastic parameter of the elastic modulus of the material of the resonator elements. By means of the invention, electrostatic actuation and problems associated therewith can be avoided and accurate resonators can be manufactured.<br/><br/><b>Patent family as of 27.9.2021<br/></b>DE602011012433 D1 20150129 DE201160012433T 20110811      <br/>EP2603975 A1 20130619 EP20110816146 20110811      <br/>EP2603975 A4 20130821 EP20110816146 20110811      <br/>EP2603975 B1 20141217 EP20110816146 20110811      <br/>FI124453 B 20140915 FI20100005849 20100813      <br/>FI20105849 A 20120214 FI20100005849 20100813      <br/>FI20105849 A0 20100813 FI20100005849 20100813      <br/>US2012038431 AA 20120216 US20110209099 20110812      <br/>US8786166 BB 20140722 US20110209099 20110812      <br/>WO12020173 A1 20120216 WO2011FI50711 20110811<br/><br/><p class="MsoNormal"><b>Link to current patent family on right </b></p>

Topics

• impedance spectroscopy
• semiconductor