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| Azevedo, Nuno Monteiro |
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Heimala, Päivi
VTT Technical Research Centre of Finland
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (4/4 displayed)
- 2020Monolithic integration of up to 40 GHz Ge photodetectors in 3μm SOIcitations
- 2013High speed micro welding of glass and silicon
- 2010Effect of Shot Number on Femtosecond Laser Drilling of Siliconcitations
- 2005Development of multi-step processing in silicon-on-insulator for optical waveguide applications
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document
Development of multi-step processing in silicon-on-insulator for optical waveguide applications
Abstract
Multi-step processing for the silicon-on-insulator (SOI)platform was developed. It allows the realisation ofadditional levels to basic microphotonic structures, sothat waveguides with different cross-sections can becombined. The concept is based on simple process steps,which are easily scalable for mass-production. Thedeveloped processes were tested with different opticalstructures