| People | Locations | Statistics |
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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Hannula, Simo-Pekka
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (48/48 displayed)
- 2022Microstructure and Properties of Additively Manufactured AlCoCr0.75Cu0.5FeNi Multicomponent Alloy: Controlling Magnetic Properties by Laser Powder Bed Fusion via Spinodal Decompositioncitations
- 2022Towards the additive manufacturing of Ni-Mn-Ga complex devices with magnetic field induced straincitations
- 2022Mechanical properties of pulsed electric current sintered CrFeNiMn equiatomic alloycitations
- 2021Hydrogen effects in equiatomic CrFeNiMn alloy fabricated by laser powder bed fusioncitations
- 2021Silica-silicon composites for near-infrared reflectioncitations
- 2021Mechanical and tribological properties of WO2.9 and ZrO2 + WO2.9 composites studied by nanoindentation and reciprocating wear testscitations
- 2021Mechanical and optical properties of as-grown and thermally annealed titanium dioxide from titanium tetrachloride and water by atomic layer depositioncitations
- 2020Round Robin into best practices for the determination of indentation size effectscitations
- 2019Effect of process parameters on non-modulated Ni-Mn-Ga alloy manufactured using powder bed fusioncitations
- 2019Effect of process parameters on non-modulated Ni-Mn-Ga alloy manufactured using powder bed fusioncitations
- 2018Tribological properties of thin films made by atomic layer deposition sliding against siliconcitations
- 2017Nanosilver-Silica Compositecitations
- 2017Nanosilver-Silica Composite : Prolonged Antibacterial Effects and Bacterial Interaction Mechanisms for Wound Dressingscitations
- 2016Thermal conductivity of amorphous Al 2 O 3 / TiO 2 nanolaminates deposited by atomic layer depositioncitations
- 2015Neutron Diffraction Study of the Martensitic Transformation and Chemical Order in Heusler Alloy Ni1.91Mn1.29Ga0.8
- 2015Characterization of Gas Atomized Ni-Mn-Ga powderscitations
- 2015Sintering of nano structural WC with cobalt matrix synthesised from soluble raw materials
- 2014Mechanical and thermal properties of pulsed electric current sintered (PECS) Cu-diamond compactscitations
- 2013ALD Al2O3 from TMA and water on Si: residual stress, elastic modulus, hardness and adhesion:residual stress, elastic modulus, hardness and adhesion
- 2013Microstructure and properties of gas atomized UHCS compacted by HIP and SPS
- 2013Microstructure and tribological properties of pulsed electric current sintered alumina-zirconia nanocomposites with different solid lubricantscitations
- 2013ALD Al2O3 from TMA and water on Si: residual stress, elastic modulus, hardness and adhesion
- 2012On the nanoindentation characterization of Al2O3 thin films grown on Si-wafer by atomic layer deposition
- 2011Pulsed electric current sintering of the Al2O3-15wt-%ZrO2 nanocomposites with 3wt-% of different solid lubricantscitations
- 2010Surface pretreatment of austenitic stainless steel and copper by chemical, plasma electrolytic or CO 2 cryoblasting techniques for sol-gel coatingcitations
- 2009The correlation of material characteristics and wear in a laboratory scale cone crushercitations
- 2009Process parameter optimization of pulsed electric current sintering of recycled WC-8Co powdercitations
- 2007Application of HVOF techniques for spraying of ceramic coatings
- 2007Comparison between plasma- and HVOF-sprayed ceramic coatings:Part I: microstructure and mechanical propertiescitations
- 2007Morphology of ferromagnetic sol-gel submicron silica powders doped with iron and nickel particlescitations
- 2007Abrasive wear properties of tool steel matrix composites in rubber wheel abrasion test and laboratory cone crusher experimentscitations
- 2007Comparison between plasma- and HVOF-sprayed ceramic coatings:Part II: tribological behaviourcitations
- 2006On the role of particle state and deposition procedure on mechanical, tribological and dielectric response of high velocity oxy-fuel sprayed alumina coatingscitations
- 2006Improved mechanical properties by nanoreinforced HVOF-sprayed ceramic composite coatings
- 2006Process optimization for nanostructured HVOF-sprayed Al2O3-based ceramic coatingscitations
- 2006Development of nano-reinforced HVOF sprayed ceramic coatingscitations
- 2006Development of nanostructured Al2O3-Ni HVOF coatingscitations
- 2006Parameter optimization of HVOF sprayed nanostructured alumina and alumina-nickel composite coatingscitations
- 2006Crystal structure and macrotwin interface of five-layered martensite in Ni-Mn-Ga magnetic shape memory alloycitations
- 2006Wear behaviour of APS and HVOF sprayed ceramic coatings
- 2006Wear behaviour of APS and HVOF sprayed ceramic coatings
- 2006Process optimization for nanostructured HVOF -sprayed Al2O3-based ceramic coatingscitations
- 2006Development of nanostructured Al2O3-NiHVOFcoatings
- 2005Process optimization and performance of nanoreinforced HVOF-sprayed ceramic coatings
- 2003Microstructures and mechanical properties of sprayformed white ironscitations
- 2003Superelastic NiTi coatings with good corrosive wear resistancecitations
- 2003Processing and properties of metal matrix composites synthesized by SHScitations
- 2003Method for the manufacture of a metal matrix composite, and a metal matrix composite
Places of action
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document
ALD Al2O3 from TMA and water on Si: residual stress, elastic modulus, hardness and adhesion
Abstract
Use of atomic layer deposition (ALD) inmicroelectromechanical systems (MEMS) has increased asALD enables conformal growth on 3-dimensional structuresat relatively low temperatures. For MEMS device designand fabrication, understanding of the residual stress andmechanical properties of thin film is crucial as theseinfluence directly the device properties and performance.Al2O3 from Me3Al and H2O is one of the most often usedmaterials, but even for that, a detailed study of themechanical properties as a function of ALD temperature ismissing. In this work a comprehensive study of thestress, elastic modulus, hardness and adhesion of atomiclayer deposited (ALD) Al2O3 films grown at 110 - 300 °Cfrom trimethylaluminum and deionized water is presented.Film stress was analysed by wafer curvature measurementsand Stoney's equation, elastic modulus by nanoindentationand surface-acoustic wave measurements, hardness bynanoindentation, and adhesion by microscratch testing andscanning nanowear measurements. The films were alsoanalysed by ellipsometry, optical reflectometry, x-rayrefl ectivity and time-of-flight elastic recoil detectionfor refractive index, thickness, density and impurities.The ALD Al2O3 films were under tensile stress, in thescale of hundreds of MPa. The magnitude of the residualstress decreased strongly with increasing ALDtemperature. Growth-induced stress accounted for most ofthe stress at low ALD temperature and its importancedecreased with increasing ALDtemperature. The stress was independent of the type ofALD reactor used. Films grown at 150 to 300 °C had afairly constant elastic modulus about 170 GPa andhardness of 10-11 GPa. Films grown at 110 °C were softerwith a lower elastic modulus, which can at least partlyexplained by the higher residual hydrogen content in thefilms. ALD Al2O3 films adhered strongly on RCA-cleanedsilicon with SiOx termination. The large set of dataobtained in this work as a function of ALD temperatureallowed a more detailed observation of the trends in themeasured properties than has been possible before. Forexample, a continuously increasing elastic modulus as afunction of ALD temperature was not observed in thisstudy. Instead, after initial increase at low temperatureelastic modulus settled to approximately constantvalue at 150 °C.