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Naji, M. |
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Motta, Antonella |
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Aletan, Dirar |
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Mohamed, Tarek |
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Ertürk, Emre |
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Taccardi, Nicola |
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Kononenko, Denys |
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Petrov, R. H. | Madrid |
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Alshaaer, Mazen | Brussels |
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Bih, L. |
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Casati, R. |
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Muller, Hermance |
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Kočí, Jan | Prague |
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Šuljagić, Marija |
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Kalteremidou, Kalliopi-Artemi | Brussels |
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Azam, Siraj |
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Ospanova, Alyiya |
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Blanpain, Bart |
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Ali, M. A. |
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Popa, V. |
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Rančić, M. |
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Ollier, Nadège |
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Azevedo, Nuno Monteiro |
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Landes, Michael |
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Rignanese, Gian-Marco |
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Laukaitis, Giedrius
Kaunas University of Technology
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (14/14 displayed)
- 2022Properties on Yttrium-Doped/Undoped Barium Cerate and Barium Zirconate Thin Films Formed by E-Beam Vapor Deposition
- 2021Properties of Barium Cerate-Zirconate Thin Filmscitations
- 2013The investigation of e-beam deposited titanium dioxide and calcium titanate thin filmscitations
- 2012Synthesis and characterization of multilayered GDC and SDC thin films deposited by e-beam technique
- 2011Scandium stabilized zirconium thin films formation by e-beam techniquecitations
- 2011The properties of scandium and cerium stabilized zirconium thin films formed by e-beam techniquecitations
- 2011Synthesis and characterization of GDC solid electrolytes obtained by solid state sintering of multilayer thin filmscitations
- 2011Influence of initial powder particle size on yttrium stabilized zirconium thin films formed by e-beam techniquecitations
- 2010The properties of gadolinium doped cerium oxide thin films formed evaporating nanopowder ceramic
- 2009Porosity evaluation of TiO2 thin films deposited using pulsed DC-magnetron sputtering
- 2009Titanium oxide thin films synthesis by pulsed – DC magnetron sputteringcitations
- 2009The properties of samarium doped ceria oxide thin films grown by e-beam deposition techniquecitations
- 2008Reactive pulsed - dc magnetron sputtering of Cr2O3 thin films
- 2007Formation of gadolinium doped ceria oxide thin films by electron beam deposition
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article
The investigation of e-beam deposited titanium dioxide and calcium titanate thin films
Abstract
Thin titanium dioxide and calcium titanate films were deposited using electron beam evaporation technique. The substrate temperature during the deposition was changed from room temperature to 600 °C to test its influence on TiO2 film formation and optical properties. The properties of CaTiO3 were investigated also. For the evaluation of the structural properties the formed thin ceramic films were studied by X-ray diffraction (XRD), energy dispersive spectrometry (EDS), scanning electron microscopy (SEM) and atomic force microscopy (AFM). Optical properties of thin TiO2 ceramics were investigated using optical spectroscope and the experimental data were collected in the ultraviolet-visible and near-infrared ranges with a step width of 1 nm. Electrical properties were investigated by impedance spectroscopy.It was found that substrate temperature has influence on the formed thin films density. The density increased when the substrate temperature increased. Substrate temperature had influence on the crystallographic, structural and optical properties also.